Field effect transistor with metal source/drain regions
First Claim
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1. A method of forming a transistor comprising:
- forming a gate electrode having a pair of laterally opposite sidewalls on a gate dielectric layer formed on a semiconductor layer;
forming a pair of source/drain extensions in said semiconductor layer on opposite sides of said gate electrode;
forming a pair of sidewall spacers adjacent to said sidewalls of said gate electrode and on said source/drain extensions;
forming a pair of source/drain contact regions in said semiconductor layer on opposite sides of said sidewall spacers;
forming an interlayer dielectric adjacent to said sidewall spacers and over said source/drain contact regions;
etching a pair of contact openings through said interlayer dielectric to expose a portion of said source/drain contact regions;
etching away a portion of said source/drain contact regions to form a pair of etched-out source/drain contact regions, each etched-out source/drain contact region having an opening into said semiconductor layer, wherein each opening into said semiconductor layer is larger than each of the pair of contact openings formed through said interlayer dielectric; and
depositing a metal film into said contact openings and into said etched-out source/drain contact regions.
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Abstract
A semiconductor device comprising a gate electrode formed on a gate dielectric layer formed on a semiconductor film. A pair of source/drain regions are formed adjacent the channel region on opposite sides of the gate electrode. The source and drain regions each comprise a semiconductor portion adjacent to and in contact with the semiconductor channel and a metal portion adjacent to and in contact with the semiconductor portion.
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Citations
8 Claims
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1. A method of forming a transistor comprising:
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forming a gate electrode having a pair of laterally opposite sidewalls on a gate dielectric layer formed on a semiconductor layer; forming a pair of source/drain extensions in said semiconductor layer on opposite sides of said gate electrode; forming a pair of sidewall spacers adjacent to said sidewalls of said gate electrode and on said source/drain extensions; forming a pair of source/drain contact regions in said semiconductor layer on opposite sides of said sidewall spacers; forming an interlayer dielectric adjacent to said sidewall spacers and over said source/drain contact regions; etching a pair of contact openings through said interlayer dielectric to expose a portion of said source/drain contact regions; etching away a portion of said source/drain contact regions to form a pair of etched-out source/drain contact regions, each etched-out source/drain contact region having an opening into said semiconductor layer, wherein each opening into said semiconductor layer is larger than each of the pair of contact openings formed through said interlayer dielectric; and depositing a metal film into said contact openings and into said etched-out source/drain contact regions. - View Dependent Claims (2, 3, 4, 5)
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6. A method of forming a nonplanar transistor comprising:
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forming a semiconductor body having a top surface opposite a bottom surface formed on an insulating layer of an insulating substrate, said semiconductor body having a pair of laterally opposite sidewalls; forming a gate dielectric layer on the top surface and sidewalls of said semiconductor body; forming a gate electrode having a pair of laterally opposite sidewalls on said gate dielectric layer and on the top surface of said semiconductor body and adjacent to said gate dielectric layer on said sidewalls of said semiconductor body; forming a pair of source/drain extensions in said semiconductor body on opposite sides of said gate electrode; forming a pair of sidewalls spacers adjacent to said gate electrode and on and adjacent to said source/drain extensions formed in said semiconductor body; forming a pair of source/drain contact regions in said semiconductor body on opposite sides of said sidewall spacers; forming an interlayer dielectric layer over and adjacent to said semiconductor body and adjacent to said sidewall spacers; etching a pair of contact openings through said interlayer dielectric layer to said source/drain contact regions in said semiconductor body; etching away a portion of said source/drain contact regions in said semiconductor body, wherein said etching of said portion of said source/drain contact regions in said semiconductor body etches until said insulating layer of said insulating substrate is reached; and depositing a metal film in said contact openings and in said etched away portion of said semiconductor body. - View Dependent Claims (7)
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8. A method of forming a nonplanar transistor comprising:
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forming a semiconductor body having a top surface opposite a bottom surface formed on an insulating layer of an insulating substrate, said semiconductor body having a pair of laterally opposite sidewalls; forming a gate dielectric layer on the top surface and sidewalls of said semiconductor body; forming a gate electrode having a pair of laterally opposite sidewalls on said gate dielectric layer and on the top surface of said semiconductor body and adjacent to said gate dielectric layer on said sidewalls of said semiconductor body; forming a pair of source/drain extensions in said semiconductor body on opposite sides of said gate electrode; forming a pair of sidewalls spacers adjacent to said gate electrode and on and adjacent to said source/drain extensions formed in said semiconductor body; forming a pair of source/drain contact regions in said semiconductor body on opposite sides of said sidewall spacers; forming an interlayer dielectric layer over and adjacent to said semiconductor body and adjacent to said sidewall spacers; etching a pair of contact openings through said interlayer dielectric layer to said source/drain contact regions in said semiconductor body; etching away a portion of each of said source/drain contact regions in said semiconductor body to provide a pair of openings into said semiconductor body, wherein each opening of said pair of openings into said semiconductor body is larger than each of the contact openings formed through said interlayer dielectric; and depositing a metal film in said contact openings and in said etched away portion of said semiconductor body.
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Specification