Microstructure with enlarged mass and electrode area for kinetic to electrical energy conversion
First Claim
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1. A microstructure comprising:
- a substrate;
a fixed electrode having a plurality of fixed fingers fixed to the substrate; and
a movable electrode having a body and a plurality of fingers extending from the body, the movable electrode being movable relative to the fixed fingers to vary a capacitance of the electrodes, wherein the plurality of fixed fingers (i) extends in a plane parallel to a main surface of the substrate and (ii) is suspended between fixation structures anchored to the substrate, and the body of the movable electrode is vertically aligned to the plurality of fingers such that the body is located outside the plane.
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Abstract
A microstructure has a substrate, a fixed electrode having a plurality of fixed fingers fixed to the substrate, a movable electrode having a body (28) and a plurality of fingers (22) extending from the body, the movable electrode being movable relative to the fixed fingers to vary a capacitance of the electrodes. The fixed fingers (21) extend in a first plane parallel to a main surface of the substrate, wherein the body of the movable electrode extends in a second plane adjacent to the first plane so that the body faces at least some of the plurality of fixed fingers. Such vertical integration can help enable such devices to be made more compact.
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Citations
9 Claims
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1. A microstructure comprising:
- a substrate;
a fixed electrode having a plurality of fixed fingers fixed to the substrate; and
a movable electrode having a body and a plurality of fingers extending from the body, the movable electrode being movable relative to the fixed fingers to vary a capacitance of the electrodes, wherein the plurality of fixed fingers (i) extends in a plane parallel to a main surface of the substrate and (ii) is suspended between fixation structures anchored to the substrate, and the body of the movable electrode is vertically aligned to the plurality of fingers such that the body is located outside the plane. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
- a substrate;
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9. An electrostatic scavenger comprising:
- a substrate;
a fixed electrode having a plurality of fixed fingers fixed to the substrate; and
a movable electrode having a body and a plurality of fingers extending from the body, the movable electrode being movable relative to the fixed fingers to vary a capacitance of the electrodes, wherein the plurality of fixed fingers (i) extends in a plane parallel to a main surface of the substrate and (ii) is suspended between fixation structures anchored to the substrate, and the body of the movable electrode is vertically aligned to the plurality of fingers such that the body is located outside the plane.
- a substrate;
Specification