Microstructure with enlarged mass and electrode area for kinetic to electrical energy conversion

• US 7,880,246 B2
• Filed: 11/26/2008
• Issued: 02/01/2011
• Est. Priority Date: 11/29/2007
• Status: Active Grant

• Current Assignee: Stichting Imec Nederland
• Original Assignee: Stichting Imec Nederland
• Inventors: Goedbloed, Martijn, Hohlfeld, Dennis
• Primary Examiner(s): Mandala; Victor A
• Application Number:
  US12/324,113
• Publication Number:
  US 20090140443A1
• Time in Patent Office: 797 Days
• Field of Search: 257/414, 257/415, 257/417
• US Class Current: 257/415
• CPC Class Codes: B81B 3/0021 Transducers for transforming electrical into mechanical energy or vice versa dynamo-electric machines H02K99/00; electrostatic machines H02N1/00; piezoelectric devices H10N30/00
• CPC Class Codes: H02N 1/08 with conductive charge carrier, i.e. capacitor machines

Abstract

A microstructure has a substrate, a fixed electrode having a plurality of fixed fingers fixed to the substrate, a movable electrode having a body (28) and a plurality of fingers (22) extending from the body, the movable electrode being movable relative to the fixed fingers to vary a capacitance of the electrodes. The fixed fingers (21) extend in a first plane parallel to a main surface of the substrate, wherein the body of the movable electrode extends in a second plane adjacent to the first plane so that the body faces at least some of the plurality of fixed fingers. Such vertical integration can help enable such devices to be made more compact.

Claims

1. A microstructure comprising:

a substrate;

a fixed electrode having a plurality of fixed fingers fixed to the substrate; and

a movable electrode having a body and a plurality of fingers extending from the body, the movable electrode being movable relative to the fixed fingers to vary a capacitance of the electrodes, wherein the plurality of fixed fingers (i) extends in a plane parallel to a main surface of the substrate and (ii) is suspended between fixation structures anchored to the substrate, and the body of the movable electrode is vertically aligned to the plurality of fingers such that the body is located outside the plane.

2. The microstructure according to claim 1, wherein the plurality of fixed fingers extends from an edge of the microstructure to an opposite edge of the microstructure.

3. The microstructure according to claim 1, wherein the fixed fingers and the fingers of the movable electrode are interdigitated.

4. The microstructure according to claim 1, the body comprising a seismic mass.

5. The microstructure according to claim 1, further comprising means for tuning a resonance frequency of the microstructure.

6. The microstructure according to claim 5, the means for tuning the resonance frequency comprising at least one electrostatic tuning actuator.

7. The microstructure according to claim 6, the at least one electrostatic tuning actuator comprising a plurality of movable tuning fingers and a plurality of fixed tuning fingers, the plurality of fixed tuning fingers having a linearly varying length, the plurality of movable tuning fingers and the plurality of fixed tuning fingers being interdigitated.

8. The microstructure according to claim 5, wherein the means for tuning the resonance frequency is vertically connected to the body such that the means may be located in the plane.

9. An electrostatic scavenger comprising:

a substrate;

a fixed electrode having a plurality of fixed fingers fixed to the substrate; and

a movable electrode having a body and a plurality of fingers extending from the body, the movable electrode being movable relative to the fixed fingers to vary a capacitance of the electrodes, wherein the plurality of fixed fingers (i) extends in a plane parallel to a main surface of the substrate and (ii) is suspended between fixation structures anchored to the substrate, and the body of the movable electrode is vertically aligned to the plurality of fingers such that the body is located outside the plane.