Wireless interface probe card for high speed one-shot wafer test and semiconductor testing apparatus having the same
First Claim
1. A wireless interface probe card for a semiconductor testing apparatus, comprising:
- a substrate member including a plurality of probe terminals having a predefined pitch, the probe terminals capable of directly contacting a plurality of pads, the pads having the predefined pitch, the pads being arranged on each of a plurality of semiconductor chips on a wafer to perform a test of the semiconductor chips; and
a plurality of transmission members constructed and arranged on the substrate member to wirelessly receive a plurality of test signals, to provide the received test signals to the pads through corresponding probe terminals, and to wirelessly transmit electrical characteristics of at least one of the semiconductor chips received via the pads through corresponding probe terminals,wherein the plurality of transmission members comprise;
a plurality of respective transceivers arranged on the substrate member and respectively corresponding to the probe terminals; and
a plurality of antennas, each antenna corresponding to one of the transceivers,wherein each of the transceivers comprises;
a receiving portion that comprises;
a first filter configured to filter at least one of the test signals received by an antenna of the plurality of antennas,a first amplifier configured to amplify an output signal of the first filter, anda demodulator configured to demodulate an output signal of the first amplifier and to provide a demodulated output signal to a probe terminal of the plurality of probe terminals;
a transmission portion that comprises;
a modulator configured to modulate at least one of the electrical characteristics of at least one of the semiconductor chips,a second filter configured to filter an output signal of the modulator, anda second amplifier configured to amplify an output signal of the second filter and to provide the amplified output signal to the antenna;
a first duplexer configured to transfer the demodulated output signal of the demodulator to the probe terminal during a receiving operation, and to transfer the at least one of the electrical characteristics from the probe terminal to the modulator during a transmission operation; and
a second duplexer configured to transfer the at least one of the test signals from the antenna to the first filter during the receiving operation, and to transfer the amplified output signal of the second amplifier to the antenna during the transmission operation.
1 Assignment
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Accused Products
Abstract
A wireless interface probe card includes a substrate member and a transmission member. The substrate member has a plurality of probe terminals arranged at a constant pitch. The probe terminals may directly contact a plurality of pads arranged at a constant pitch on each of a plurality of semiconductor chips arranged on a wafer to perform a test of the semiconductor chips arranged on the wafer. The transmission member is arranged on the substrate member, wirelessly receives a test signal and provides the received test signal to the pads of the wafer through the probe terminals, and wirelessly and externally transmits an electrical characteristic signal provided from the pads of the wafer through the probe terminals.
18 Citations
20 Claims
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1. A wireless interface probe card for a semiconductor testing apparatus, comprising:
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a substrate member including a plurality of probe terminals having a predefined pitch, the probe terminals capable of directly contacting a plurality of pads, the pads having the predefined pitch, the pads being arranged on each of a plurality of semiconductor chips on a wafer to perform a test of the semiconductor chips; and a plurality of transmission members constructed and arranged on the substrate member to wirelessly receive a plurality of test signals, to provide the received test signals to the pads through corresponding probe terminals, and to wirelessly transmit electrical characteristics of at least one of the semiconductor chips received via the pads through corresponding probe terminals, wherein the plurality of transmission members comprise; a plurality of respective transceivers arranged on the substrate member and respectively corresponding to the probe terminals; and a plurality of antennas, each antenna corresponding to one of the transceivers, wherein each of the transceivers comprises; a receiving portion that comprises; a first filter configured to filter at least one of the test signals received by an antenna of the plurality of antennas, a first amplifier configured to amplify an output signal of the first filter, and a demodulator configured to demodulate an output signal of the first amplifier and to provide a demodulated output signal to a probe terminal of the plurality of probe terminals; a transmission portion that comprises; a modulator configured to modulate at least one of the electrical characteristics of at least one of the semiconductor chips, a second filter configured to filter an output signal of the modulator, and a second amplifier configured to amplify an output signal of the second filter and to provide the amplified output signal to the antenna; a first duplexer configured to transfer the demodulated output signal of the demodulator to the probe terminal during a receiving operation, and to transfer the at least one of the electrical characteristics from the probe terminal to the modulator during a transmission operation; and a second duplexer configured to transfer the at least one of the test signals from the antenna to the first filter during the receiving operation, and to transfer the amplified output signal of the second amplifier to the antenna during the transmission operation. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A semiconductor testing apparatus comprising:
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a tester head configured to provide test signals to each of a plurality of pads arranged on each of a plurality of semiconductor chips arranged on a wafer, and to determine whether any of the semiconductor chips are defective by receiving electrical characteristics of each of the semiconductor chips via the pads; a wireless interface probe card comprising a first substrate member including a plurality of probe terminals, the probe terminals capable of directly contacting the pads arranged on each of the semiconductor chips arranged on the wafer to perform a test of each of the semiconductor chips, and a plurality of transmission members arranged on the first substrate member to wirelessly receive the test signals, to provide the received test signals to the pads through the probe terminals, and to wirelessly transmit the electrical characteristics of each of the semiconductor chips received via the pads; and a wireless interface card comprising a second substrate member and configured to receive the test signals from the tester head, and including a plurality of transmission members arranged on the second substrate member to wirelessly transmit the received test signals to the plurality of transmission members of the wireless interface probe card, and to wirelessly receive the electrical characteristics of each of the semiconductor chips from the plurality of transmission members of the wireless interface probe card, wherein the first substrate member is separate from the second substrate member. - View Dependent Claims (10, 11, 12, 13, 14, 15, 16, 17)
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18. A semiconductor testing system comprising:
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a tester head configured to provide test signals; a wireless interface card electrically coupled to the tester head, the wireless interface card configured to receive the test signals and to wirelessly transmit the test signals; and a wireless interface probe card including a plurality of probe terminals configured to be coupled to pads of each of a plurality of semiconductor chips, the wireless interface probe card configured to wirelessly transmit electrical characteristics of each of the semiconductor chips to the wireless interface card responsive to the test signals, wherein the wireless interface card includes a plurality of transmission members arranged on a first substrate member to wirelessly receive the electrical characteristics from the wireless interface probe card, and to wirelessly transmit the test signals to the wireless interface probe card, wherein the wireless interface probe card includes a plurality of transmission members arranged on a second substrate member to wirelessly receive the test signals from the wireless interface card and to wirelessly transmit the electrical characteristics to the wireless interface card, and wherein the first substrate member is separate from the second substrate member. - View Dependent Claims (19, 20)
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Specification