Mirror device with an anti-stiction layer
First Claim
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1. A micromirror device, comprising:
- an elastic hinge composed of a conductive material extends from a substrate for supporting a mirror thereon;
an address electrode for receiving an electrical signal to deflect the mirror;
a protective layer covers and insulates the address electrode; and
an oriented monolayer composed of a compound of a plurality of oriented mono-molecules covers the back surface of the mirror, and the protective layer as an anti-stiction layer.
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Abstract
A micromirror device includes an elastic hinge for supporting a mirror on a substrate, and an address electrode for deflecting the mirror. The device further includes a protective layer and an oriented monolayer laid to cover a stopper also functioning as an address electrode provided below the mirror and between the mirror and the substrate.
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Citations
13 Claims
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1. A micromirror device, comprising:
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an elastic hinge composed of a conductive material extends from a substrate for supporting a mirror thereon; an address electrode for receiving an electrical signal to deflect the mirror; a protective layer covers and insulates the address electrode; and an oriented monolayer composed of a compound of a plurality of oriented mono-molecules covers the back surface of the mirror, and the protective layer as an anti-stiction layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A method for producing a micromirror device, comprising:
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forming a plurality of elastic hinges extended from a substrate wherein each of said hinges supports a mirror thereon with two of adjacent mirrors having a gap of approximately 0.55 μ
m or less and wherein said hinge is composed of a conductive material having a width greater than the gap between two of said adjacent mirrors;forming a stopper on a top surface of said substrate adjacent to the hinge for stopping the mirror at a maximum deflection angle; forming an address electrode to receive a signal for deflecting the mirror; and forming a protective layer to cover and insulate the address electrode; and forming an oriented monolayer composed of a compound of a plurality of oriented mono-molecules to cover the bottom surface of the mirror, the stopper, and the protective layer as an anti-stiction layer for preventing a stiction between the bottom surface of the mirror, the stopper and the address electrode.
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13. A projection device comprising:
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a micromirror device comprising; a mirror supported on a deformable hinge extended from a substrate for deflecting to different angles for reflecting an incident light to an ON light state and an OFF light state; an address electrode disposed on a top surface of the substrate below the mirror to receive mirror control signals for generating a Coulomb force for deflecting the mirror to said different angles; a stopper disposed near the hinge for stopping the mirror at a maximum deflection angle; and a drive circuit for generating and transmitting the mirror control signals to the address electrode, wherein the stopper is covered by two or more different types of oriented mono-layers composed of a compound with molecules containing six halogenated carbon or less.
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Specification