Primary server architectural networking arrangement and methods therefor

• US 7,882,076 B2
• Filed: 12/14/2006
• Issued: 02/01/2011
• Est. Priority Date: 12/14/2006
• Status: Active Grant

• Current Assignee: Lam Research Corporation
• Original Assignee: Lam Research Corporation
• Inventors: Huang, Chung-Ho, Weetman, Chad R.
• Primary Examiner(s): Abel-Jalil; Neveen
• Assistant Examiner(s): MINCEY, JERMAINE A
• Application Number:
  US11/610,687
• Publication Number:
  US 20080147668A1
• Time in Patent Office: 1,510 Days
• Field of Search: None
• US Class Current: 707/673
• CPC Class Codes: G06F 16/10 File systems; File servers

Abstract

An arrangement for performing at least one of collecting and analyzing data from a tool cluster configured to process a set of substrates is provided. The arrangement includes a plurality of tools from which at least one tool of the plurality of tools has a chamber for processing at least one of the set of substrates. The arrangement also includes a plurality of secondary servers configured to collect sensor data from the plurality of tools. The arrangement further includes a primary server communicably coupled with the plurality of secondary servers and configured to execute a database management system. The sensor data is indexed using a plurality of indexing applications on the plurality of secondary servers prior to being forwarded to the primary server for use by the database management system. Indexing includes associating a sensor data item with an identity of a server where the sensor data item is stored.

Claims

1. An arrangement for performing at least one of collecting and analyzing data from a tool cluster configured to process a set of substrates, said tool cluster including at least a plurality of tools, said plurality of tools including at least a first tool and a second tool, said arrangement comprising:

a plurality of secondary servers configured to collect sensor data from said plurality of tools, each of said plurality of secondary servers being configured to execute a data indexing application, said plurality of secondary servers including at least a first server and a second server, said first server being configured to store a first set of sensor data collected from said first tool, said first server being further configured to execute a first data indexing application to at least associate said first set of sensor data with an identity of said first server for producing first indexed data, said second server being configured to store a second set of sensor data collected from at least one of said first tool and said second tool, said second server being further configured to execute a second data indexing application to at least associate said second set of sensor data with an identity of said second server for producing second indexed data; and

a primary server communicably coupled with said plurality of secondary servers, said primary server being configured to execute a database management system, said primary server being further configured to receive said first indexed data from said first server and to receive said second indexed data from said second server, said database management system being configured to store said first indexed data and said second indexed data, said first indexed data including at least said identity of said first server, said second indexed data including at least said identity of said second server, wherein said primary server is configured to include an overlord indexing application for indexing data stored in said primary server, and said plurality of secondary servers is configured to include-a plurality of minion indexing applications, said overlord indexing application being configured to define and manage a set of relationships between said plurality of tools and at least one of said primary server and said plurality of secondary servers, said overlord indexing application being further configured to forward said plurality of relationships to said plurality of minion indexing applications.

2. The arrangement of claim 1 wherein said tool cluster is a plasma processing cluster tool.

3. The arrangement of claim 1 wherein said primary server including a unified access user interface, said unified access user interface being configured to receive a search criteria, wherein said primary server is configured to employ said search criteria in searching said database management system to identify a file path and a server name for a data file of a plurality of data files, said database management system being configured to store a plurality of indexed data items about said plurality of data files, said server name being an identity of a server that stores said data file of said plurality of data files, said plurality of indexed data items including at least said file path and said server name.

4. The arrangement of claim 1 wherein said primary server including a web access user interface, said web access user interface being configured to receive a search criteria, wherein said primary server is configured to employ said search criteria in searching said database management system to identify a file path and a server name for a data file of a plurality of data files, said database management system being configured to store a plurality of indexed data items about said plurality of data files, said server name being an identity of a server that stores said data file of said plurality of data files, said plurality of indexed data items including at least said file path and said server name.

5. The arrangement of claim 1 wherein said primary server is configured to collect a third set of sensor data from said plurality of tools, said primary server being configured to execute a third indexing application to index said third set of sensor data.

6. The arrangement of claim 1 wherein said primary server is geographically remote from said plurality of secondary servers and said primary server is connected to said plurality of secondary servers using the internet.

7. A method for performing at least one of collecting and analyzing data from a tool cluster configured to process a set of substrates, said tool cluster including at least a plurality of tools, said plurality of tools including at least a first tool and a second tool, said method comprising:

collecting sensor data from said plurality of tools, said sensor data including at least a first set of sensor data collected from said first tool, said sensor data further including at least a second set of sensor data collected from at least one of said first tool and said second tool;

sending said sensor data to a plurality of secondary servers, said plurality of secondary servers including at least a first server and a second server;

storing said first set of sensor data in said first server;

storing said second set of sensor data in said second server;

executing, using said first server, a first data indexing application to at least associate said first set of sensor data with an identity of said first server for producing first indexed data;

executing, using said second server, a second data indexing application to at least associate said second set of sensor data with an identity of said second server for producing second indexed data;

sending said first indexed data to a primary server, said primary server being communicably coupled with said plurality of secondary servers, said primary server being configured to execute a database management system;

sending said second indexed data to said primary server; and

storing said first indexed data and said second indexed data in said database management system, said first indexed data including at least said identity of said first server, said second indexed data including at least said identity of said second server, wherein said primary server is configured to include an overlord indexing application for indexing data stored in said primary server, and said plurality of secondary servers is configured to include a plurality of minion indexing applications, said overlord indexing application being configured to define and manage a set of relationships between said plurality of tools and at least one of said primary server and said plurality of secondary servers, said overlord indexing application being further configured to forward said plurality of relationships to said plurality of minion indexing applications.

8. The method of claim 7 wherein said tool cluster is a plasma processing cluster tool.

9. The method of claim 7 wherein said primary server including a unified access user interface, said unified access user interface being configured to receive a search criteria, wherein said primary server is configured to employ said search criteria in searching said database management system to identify a file path and a server name for a data file of a plurality of data files, said database management system being configured to store a plurality of indexed data items about said plurality of data files, said server name being an identity of a server that stores said data file of said plurality of data files, said plurality of indexed data items including at least said file path and said server name.

10. The method of claim 7 wherein said primary server including a web access user interface, said web access user interface being configured to receive a search criteria, wherein said primary server is configured to employ said search criteria in searching said database management system to identify a file path and a server name for a data file of a plurality of data files, said database management system being configured to store a plurality of indexed data items about said plurality of data files, said server name being an identity of a server that stores said data file of said plurality of data files, said plurality of indexed data items including at least said file path and said server name.

11. The method of claim 7 wherein said primary server is configured to collect a third set of sensor data from said plurality of tools, said primary server being configured to execute a third indexing application to index said third set of sensor data.

12. The method of claim 7 wherein said primary server is geographically remote from said plurality of secondary servers and said primary server is connected to said plurality of secondary servers using the interne.

13. A computer-implemented method for performing at least one of collecting and analyzing data from a tool cluster configured to process a set of substrates, said tool cluster including at least a plurality of tools, said plurality of tools including at least a first tool and a second tool, said method comprising:

collecting sensor data from said plurality of tools, said sensor data including at least a first set of sensor data collected from said first tool, said sensor data further including at least a second set of sensor data collected from at least one of said first tool and said second tool;

storing said first set of sensor data in a first server;

storing said second set of sensor data in a second server;

executing, using said first server, a first data indexing application to at least associate said first set of sensor data with an identity of said first server for producing first indexed data;

executing, using said second server, a second data indexing application to at least associate said second set of sensor data with an identity of said second server for producing second indexed data;

sending said first indexed data to a primary server, said primary server being communicably coupled with said first server and said second server, said primary server being configured to execute a database management system;

sending said second indexed data to said primary server; and

storing said first indexed data and said second indexed data in said database management system, said first indexed data including at least said identity of said first server, said second indexed data including at least said identity of said second server, wherein said primary server is configured to include said overlord indexing application for indexing data stored in said primary server, a plurality of secondary servers includes at least said first server and said second server, and said plurality of secondary servers is configured to execute a plurality of minion indexing applications, said overlord indexing application being configured to define and manage a set of relationships between said plurality of tools and at least one of said primary server and said plurality of secondary servers, said overlord indexing application being configured to forward said plurality of relationships to said plurality of minion indexing applications.

14. The computer-implemented method of claim 13 wherein said tool cluster is a plasma processing cluster tool.

15. The computer-implemented method of claim 13 wherein said primary server including a unified access user interface, said unified access user interface being configured to receive a search criteria, wherein said primary server is configured to employ said search criteria in searching said database management system to identify a file path and a server name for a data file of a plurality of data files, said database management system being configured to store a plurality of indexed data items about said plurality of data files, said server name being an identity of a server that stores said data file of said plurality of data files, said plurality of indexed data items including at least said filepath and said server name.

16. The computer-implemented method of claim 13 wherein said primary server including a web access user interface, said web access user interface being configured to receive a search criteria, wherein said primary server is configured to employ said search criteria in searching said database management system to identify a file path and a server name for a data file of a plurality of data files, said database management system being configured to store a plurality of indexed data items about said plurality of data files, said server name being an identity of a server that stores said data file of said plurality of data files, said plurality of indexed data items including at least said file path and said server name.

17. The computer-implemented method of claim 13 wherein said primary server is configured to collect a third set of sensor data from said plurality of tools, said primary server being configured to execute a third indexing application to index said third set of sensor data.

18. The computer-implemented method of claim 13 wherein said primary server is geographically remote from plurality of secondary servers that includes at least said first server and said second server, and said primary server is connected to said plurality of secondary servers using the internet.