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Capacitive pressure sensor

  • US 7,884,706 B2
  • Filed: 08/31/2006
  • Issued: 02/08/2011
  • Est. Priority Date: 06/06/2002
  • Status: Active Grant
First Claim
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1. A pressure sensor, comprising:

  • a first conductive layer including first and second conductive plates;

    a second conductive layer; and

    a compressible dielectric layer between the first and second conductive layers, wherein one side of the compressible dielectric layer has contiguous contact with both a surface of the first conductive plate and a surface of the second conductive plate, and wherein an opposite side of the compressible dielectric layer has contiguous contact with a surface of the second conductive layer;

    wherein the first conductive plate and the second conductive layer form a first capacitor;

    wherein the second conductive plate and the second conductive layer form a second capacitor in series with the first capacitor;

    wherein the capacitances of the first and second capacitors are measurable via a first lead coupled to the first conductive plate and a second lead coupled to the second conductive plate without a lead coupled to the second conductive layer; and

    wherein the first and second capacitors are configured to reflect a capacitance according to pressure changes on the compressible dielectric layer.

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