Integrated quartz biological sensor and method
First Claim
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1. An apparatus comprising:
- a mass detector disposed within a cavity to detect a sample in said cavity; and
an optical Surface Enhanced Raman Spectroscopy (SERS) detector disposed within said cavity to detect said sample.
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Abstract
A sensor integrates a quartz nanoresonator for mass detection and SERS for optical detection in a same cavity on a chip for redundancy in the detection of a species.
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Citations
21 Claims
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1. An apparatus comprising:
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a mass detector disposed within a cavity to detect a sample in said cavity; and an optical Surface Enhanced Raman Spectroscopy (SERS) detector disposed within said cavity to detect said sample. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A method for fabricating a sensor comprising the steps of:
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providing a quartz substrate; providing at least one electrode and at least one tuning pad to the quartz substrate; providing a silicon handle wafer having a cavity etched therein; bonding the silicon handle wafer to the quartz substrate; thinning the quartz substrate; metallizing the quartz substrate; providing a silicon base wafer; providing a diffraction grating to the silicon base wafer; metallizing the silicon base wafer; bonding the quartz substrate to the silicon base wafer and subsequently removing the silicon handle wafer, thereby producing a resonator; removing quartz from the resonator thus obtaining a modified resonator; providing a cap silicon wafer having a cavity etched therein; proving a vertical cavity surface emitting laser (VCSEL) on the cap wafer; proving an integrated beamsplitter and lens assembly to the top surface of the cap wafer; providing a lens to the top surface of the cap silicon wafer; providing a detector array on the cavity of the cap wafer; inverting the cap wafer, and bonding the inverted cap wafer to the modified resonator. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18, 19, 20, 21)
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Specification