High sensitivity acoustic wave microsensors based on stress effects

• US 7,886,575 B2
• Filed: 10/19/2007
• Issued: 02/15/2011
• Est. Priority Date: 11/01/2006
• Status: Expired due to Fees

• Current Assignee: Knowles Capital Formation, Inc. (Knowles Corporation)
• Original Assignee: Delaware Capital Formation Incorporated (Dover Corporation)
• Inventors: Stevens, Daniel S, Andle, Jeffrey C, Haskell, Reichl B
• Primary Examiner(s): Kwok; Helen C.
• Application Number:
  US11/875,162
• Publication Number:
  US 20080163694A1
• Time in Patent Office: 1,215 Days
• Field of Search: 73/240.6, 73/310.5, 73/310.6, 735/99, 73/240.1
• US Class Current: 73/24.01
• CPC Class Codes: G01N 2291/02491 Materials with nonlinear acoustic properties
• CPC Class Codes: G01N 2291/02827 Elastic parameters, strength or force
• CPC Class Codes: G01N 2291/0423 Surface waves, e.g. Rayleigh waves, Love waves
• CPC Class Codes: G01N 2291/0427 Flexural waves, plate waves, e.g. Lamb waves, tuning fork, cantilever
• CPC Class Codes: G01N 29/022 Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices microdevices per se B81B
• CPC Class Codes: G01N 29/2412 using the magnetostrictive properties of the material to be examined, e.g. electromagnetic acoustic transducers [EMAT]; investigating the presence of flaws using eddy currents G01N27/90, magnetostrictive transducers B06B1/08, measuring magnetostrictive properties G01R33/18

Abstract

Acoustic sensing utilizing a bridge structure coupled about a portion of at least two sides of said bridge to a base substrate, wherein said bridge includes a piezoelectric section and has at least one active acoustic region proximate said bridge. A sensing material is disposed on at least a portion of at least one surface of the bridge, wherein the bridge produces stress effects measurable by an acoustic wave device located in the active acoustic region. According to one embodiment, the stress effects are measured by an acoustic wave device to sense a target matter. As target molecules accumulate on a sensing film affixed to at least a portion of the bridge, stress is produced in the bridge inducing a frequency change measured by an acoustic wave device.

Claims

1. A system for acoustic sensing, comprising:

a bridge structure coupled to a substrate about at least two sides of said bridge structure, wherein said bridge structure includes a piezoelectric section and has at least one acoustic wave device (AWD) proximate a portion of said bridge structure, said AWD includes an active acoustic region;

wherein a perturbation of said bridge structure produces stress effects measurable by said AWD;

wherein resonance of said AWD is independent of the intrinsic resonant flexural frequency of said bridge structure, and wherein said AWD is a bulk-generated acoustic wave (BGAW) device and operates by at least one of energy-trapping and thickness-resonance modes.

2. The system according to claim 1, further comprising a sensing material disposed on at least a portion of at least one surface of said bridge structure.

3. The system according to claim 2, wherein said sensing material is selected from at least one of the group consisting of:

metal, metal oxide, metal nitride, ceramic, carbide, polymer, magnetic material, magnetostrictive material, electrostrictive material, and biological material.

4. The system according to claim 1, wherein said active acoustic region is a thickness field excitation (TFE) structure formed by at least one positive electrode disposed on one side of said bridge structure and at least one ground electrode on an opposing side of said bridge structure, and wherein an electrical energy source is coupled to said at least one positive electrode and said at least one ground electrode.

5. The system according to claim 4, wherein said thickness field excitation (TFE) structure is a two port device wherein a first transducer is electrically coupled to said electrical energy source by a first positive electrical connection and a first negative electrical connection and a second transducer provides a response related to an input electrical signal from said electrical energy source to a second positive electrical connection and a second negative electrical connection.

6. The system according to claim 1, wherein said active acoustic region is a lateral field excitation (LFE) structure formed by at least one positive electrode and at least one negative electrode electrically coupled on one side of said bridge structure and to an electrical energy source.

7. The system according to claim 1, wherein said bridge structure is a structure selected from at least one of the group consisting of:

full bridge bulk acoustic wave, full bridge bulk acoustic wave monolithic crystal filter (MCF), full bridge bulk acoustic wave lateral field excitation (LFE), full bridge surface generated acoustic wave, full bridge film bulk acoustic resonator (FBAR), isolation bridge bulk acoustic wave, isolation bridge bulk acoustic wave MCF, isolation bridge bulk acoustic wave LFE, isolation bridge surface generated acoustic wave, and isolation bridge bulk acoustic wave FBAR.

8. The system according to claim 1, wherein said bridge structure is coupled to said substrate by one of the group consisting of:

two supports and four supports.

9. The system according to claim 1, further comprising a measurement device coupled to said acoustic wave device (AWD) and measuring said stress effects.

10. A method for detecting a target substance, comprising:

forming a piezoelectric bridge having at least one acoustic wave device (AWD) disposed proximate a portion of said bridge, wherein resonance of said AWD is independent of the intrinsic resonant flexural frequency of said bridge, and said AWD is a bulk-generated acoustic wave (BGAW) device and operates by at least one of energy-trapping and thickness-resonance modes;

exposing said bridge to some environment;

causing a stress response of said bridge from said environment; and

detecting a response of said acoustic wave device to said bridge stress response.

11. The method according to claim 10, further comprising disposing a sensing material on at least one portion of said bridge and allowing adsorption/absorption of said target substance by said sensing material.

12. The method according to claim 10, further comprising aligning said acoustic wave device at an angle (ψ

) for a maximum change in frequency.

13. A sensing device for measuring stress effects, comprising:

a substrate having electrical connections disposed about said substrate and providing connectivity to an electrical energy source and a measurement device;

a bridge structure coupled to said substrate on a portion of at least two sides of said bridge structure comprising;

at least one acoustic wave device (AWD) formed proximate a portion of said bridge structure,

said acoustic wave device comprising a piezoelectric section with at least two electrodes disposed thereon, wherein resonance of said AWD is independent of the intrinsic resonant flexural frequency of said bridge structure, and said AWD is a bulk-generated acoustic wave (BGAW) device and operates by at least one of energy-trapping and thickness-resonance modes,

wherein a perturbation of said bridge structure causes a change in electrical properties of said acoustic wave device,

said change in electrical properties modifying a signal from said electrical energy source in a manner that is measurable by said measurement device.

14. The device according to claim 13, further comprising a sensing material disposed on at least a portion of at least one surface of said bridge structure causing said perturbation of said bridge structure.

15. The device according to claim 13, wherein said sensing device is selected from at least one of the group consisting of:

bulk acoustic wave (BAW) bridge gas sensors, BAW bridge magnetic sensors, BAW bridge torque sensors, monolithic crystal filter (MCF) bridge gas sensors, MCF bridge magnetic sensors, MCF bridge torque sensors, film bulk acoustic resonator (FBAR) bridge gas sensors, FBAR magnetic sensors, and FBAR torque sensors.

16. The device of claim 13, wherein said piezoelectric section is selected from the group consisting of quartz, lithium niobate, lithium tantalate, langasite, aluminum phosphate, gallium phosphate, calcium-niobium-gallium-silicate, calcium-tantalum-gallium-silicate, strontium-niobium-gallium-silicate, strontium-tantalum-gallium-silicate, zinc oxide, aluminum nitride, and compositions thereof.

17. A system for acoustic sensing, comprising:

a bridge structure coupled to a substrate about a portion of at least two sides of said bridge structure, wherein said bridge structure includes a piezoelectric section and having at least one acoustic wave device (AWD) proximate a portion of said bridge structure,

wherein said AWD includes an active acoustic region,

wherein boundaries of said active acoustic region are decoupled from boundaries of said bridge structure;

an electrical signal coupled to said bridge structure,

wherein stresses induced in said bridge structure produce force-frequency effects measurable by said AWD;

wherein said force-frequency effects induce modulation of said electrical signal;

wherein resonance of said AWD is independent of the intrinsic resonant flexural frequency of said bridge structure, and said AWD is a bulk-generated acoustic wave (BGAW) device and operates by at least one of energy-trapping and thickness-resonance modes.

18. A sensing device for measuring physical parameters, comprising:

a substrate having electrical connections disposed about said substrate and providing connectivity to an electrical energy source and a measurement device;

a bridge coupled to said substrate on a portion of at least two sides of said bridge, said bridge comprising;

at least one acoustic wave device (AWD) formed proximate a portion of said bridge, said acoustic wave device comprising a piezoelectric section with at least two electrodes disposed thereon, wherein said bridge is responsive to stresses induced by application of a point force to said bridge,

wherein a bridge stress response causes a change in electrical properties of said acoustic wave device, said change in electrical properties modifying a signal from said electrical energy source in a manner that is measurable by said measurement device, wherein resonance of said AWD is independent of the intrinsic resonant flexural frequency of said bridge structure, and said AWD is a bulk-generated acoustic wave (BGAW) device and operates by at least one of energy-trapping and thickness-resonance modes.

19. The device according to claim 18, further comprising a diaphragm responsive to pressure disposed proximate said bridge, wherein said diaphragm transmits said point force.

20. The device according to claim 18, wherein magnetic fields acting upon a magnetic region proximate said bridge produce said point force.

21. The device according to claim 18, wherein an acceleration acting upon a proof mass proximate said bridge produces said point force.