Microelectromechanical sensor having multiple full-scale and sensitivity values

• US 7,886,601 B2
• Filed: 10/26/2007
• Issued: 02/15/2011
• Est. Priority Date: 10/27/2006
• Status: Active Grant

• Current Assignee: STMicroelectronics SRL (STMicroelectronics NV)
• Original Assignee: STMicroelectronics SRL (STMicroelectronics NV)
• Inventors: Merassi, Angelo, Zerbini, Sarah, Geitner, Hubert, Del Sarto, Marco
• Primary Examiner(s): CHAPMAN JR, JOHN E
• Application Number:
  US11/978,056
• Publication Number:
  US 20080098815A1
• Time in Patent Office: 1,208 Days
• Field of Search: 735/143.2, 735/141.8, 361/280, 361/283.1
• US Class Current: 73/514.32
• CPC Class Codes: G01P 1/023 for acceleration measuring devices
• CPC Class Codes: G01P 15/0891 with indication of predetermined acceleration values G01P15/135 takes precedence
• CPC Class Codes: G01P 15/125 by capacitive pick-up
• CPC Class Codes: G01P 2015/0814 for translational movement of the mass, e.g. shuttle type
• CPC Class Codes: G01P 2015/082 for two degrees of freedom of movement of a single mass
• CPC Class Codes: G01P 2015/0831 the mass being of the paddle type having the pivot axis between the longitudinal ends of the mass, e.g. see-saw configuration

Abstract

A microelectromechanical sensing structure is provided with a mobile element adapted to be displaced as a function of a quantity to be detected, and first fixed elements, capacitively coupled to the mobile element and configured to implement with the mobile element first detection conditions. The sensing structure is further provided with second fixed elements, capacitively coupled to the mobile element and configured to implement with the mobile element second detection conditions, which are different from the first detection conditions. In particular, the first and second detection conditions differ with respect to a full-scale or a sensitivity value in the detection of the aforesaid quantity.

Claims

1. A microelectromechanical sensing structure comprising:

a mobile element adapted to be displaced as a function of a quantity to be detected;

first fixed elements capacitively coupled to said mobile element and configured to implement with said mobile element to provide first detection conditions of said quantity; and

second fixed elements capacitively coupled to said mobile element and configured to implement with said mobile element to provide second detection conditions of said quantity, wherein said second detection conditions are different from said first detection conditions with respect to a full-scale value and a sensitivity value associated with detection of said quantity, wherein a total number of all of said first fixed elements is higher than a total number of all of said second fixed elements, and a lower value of said full scale and a higher value of said sensitivity is associated with said first fixed elements.

2. The sensing structure according to claim 1, wherein said first and second fixed elements face said mobile element, said first fixed elements are arranged so as to form with said mobile element a first sensing capacitor, said second fixed elements are arranged so as to form with said mobile element a second sensing capacitor, said first and second sensing capacitors having a different value of capacitance at rest and a different capacitive variation as a function of displacement of said mobile element, and said at least one of the full-scale value and sensitivity value is a function of said capacitance at rest and/or of said capacitive variation of said first and second sensing capacitors.

3. The sensing structure according to claim 2, wherein said first and second sensing capacitors are parallel-plate capacitors.

4. The sensing structure according to claim 1, wherein said mobile element comprises a body extending substantially along a plane and mobile electrodes extending from said body in a first direction and/or a second direction along said plane, said first and second fixed elements extending in said first direction and/or second direction substantially parallel to and facing respective mobile electrodes, and said mobile element is adapted to displace in said first direction and/or second direction as a function of said quantity to be detected.

5. The sensing structure according to claim 4, wherein said first fixed elements, at rest, are positioned at a first distance from said respective mobile electrodes, and said second fixed elements, at rest, are positioned at a second distance from said respective mobile electrodes, said first distance is smaller than said second distance.

6. The sensing structure according to claim 1, wherein said mobile element comprises a body extending substantially along a plane and being free to rotate about a tilting axis away from said plane, and said first and second fixed elements are underneath said plane and face said body, said first fixed elements having a first facing area that faces said body and positioned at a first distance from said tilting axis, said second fixed electrodes having a second facing area that faces said body and positioned at a second distance from said tilting axis, said first facing area and said first distance are different from said second facing area and said second distance, respectively, the first fixed elements having a greater facing area and a greater distance from said tilting axis than the second fixed elements.

7. The sensing structure according to claim 1, wherein said mobile element comprises a body including a plurality of portions electrically insulated from one another by one or more insulation barriers, and said first and second fixed elements are capacitively coupled to each of said portions.

8. The sensing structure according to claim 1, wherein said body is formed by first and second halves, the first and second halves are separated by a first insulation barrier, said first fixed elements and said second fixed elements being capacitively coupled to each of said first and second halves.

9. The sensing structure according to claim 1, wherein said first fixed elements comprise first electrodes electrically connected to one another, and said second fixed elements comprise second electrodes electrically connected to one another, said first electrodes being electrically insulated from the second electrodes.

10. The sensing structure according to claim 1 wherein a distance between adjacent first fixed elements that are capacitively coupled to a first element of the mobile element is smaller than a distance between adjacent second fixed elements that are capacitively coupled to a second element of the mobile element.

11. A sensor comprising:

an electromechanical sensing structure comprising;

a mobile element displaceable in response to a quantity to be detected;

a plurality of first fixed elements capacitively coupled to said mobile element, said plurality of first fixed elements configured to operate with said mobile element to define a first detection condition of said quantity; and

a plurality of second fixed elements capacitively coupled to said mobile element, said plurality of second fixed elements configured to operate with said mobile element to define a second detection condition of said quantity, wherein said first detection condition is different from said second detection condition with respect to a full-scale value and a sensitivity value associated with detection of said quantity, wherein a total number of all of said first fixed elements is higher than a total number of all of said second fixed elements, a lower value of said full scale and a higher value of said sensitivity is associated with said first fixed elements;

processing electronics comprising a processing stage and a gain stage in communication with the processing stage, the processing stage configured to process output from the electromechanical sensing structure.

12. The sensor according to claim 11, wherein the

processing stage is coupled to said electromechanical sensing structure and a selector adapted to couple selectively said plurality of first fixed elements or said plurality of second fixed elements to said processing stage, for selection of said first or second detection conditions.

13. The sensor according to claim 12, wherein said pluralities of first fixed elements are connected electrically to one another and to a first sensing contact, said pluralities of second fixed elements are connected electrically to one another and to a second sensing contact, and said selector is adapted to connect said processing stage selectively to said first sensing contact or said second sensing contact so as to enable detection of said first or second detection conditions, respectively.

14. The sensor according to claim 12, wherein said selector further comprises switch elements configured to connect electrically to one another insulated portions of a body of the mobile element in order to vary a value associated with said first or second detection conditions.

15. The sensor according to claim 11, wherein the gain stage is connected to an output of said processing stage, said selector being further adapted to vary gain of said gain stage in order to vary a value associated with said first or second detection conditions.

16. The sensor according to claim 11, wherein said sensor is a uniaxial or a biaxial accelerometer, and said quantity to be detected is an acceleration or a deceleration of said sensor.

17. The sensor according to claim 11, wherein a distance between adjacent first fixed elements that are capacitively coupled to a first element of the mobile element is smaller than a distance between adjacent second fixed elements that are capacitively coupled to a second element of the mobile element.

18. An electronic system for use in a motor vehicle, comprising:

an electromechanical sensing structure comprising;

a mobile element displaceable in response to a quantity to be detected;

a plurality of first fixed elements capacitively coupled to said mobile element, said plurality of first fixed elements configured to operate with said mobile element to define a first detection condition of said quantity;

a plurality of second fixed elements capacitively coupled to said mobile element, said plurality of second fixed elements configured to operate with said mobile element to define a second detection condition of said quantity, wherein said first detection condition is different from said second detection condition with respect to a full-scale value and a sensitivity value associated with detection of said quantity;

wherein said mobile element comprises a body extending substantially along a plane and being free to rotate about a tilting axis away from said plane, and said first and second fixed elements are underneath said plane and face said body, said first fixed elements having a first facing area that faces said body and positioned at a first distance from said tilting axis, said second fixed electrodes having a second facing area that faces said body and positioned at a second distance from said tilting axis, said first facing area and said first distance are different from said second facing area and said second distance, respectively, a lower value of said full scale and a higher value of said sensitivity correspond to said first or second fixed elements having a greater facing area and a greater distance from said tilting axis;

a processing stage coupled to said electromechanical sensing structure, said processing stage being adapted to process said quantity to be detected in order to control an airbag, an ABS, and/or a stability-control system of a motor vehicle.

19. The electronic system of claim 18, wherein said pluralities of first fixed elements are connected electrically to one another and to a first sensing contact, said pluralities of second fixed elements are connected electrically to one another and to a second sensing contact, and a selector adapted to couple said pluralities of said first and second fixed elements to said processing stage.

20. The electronic system of claim 18, further comprising a gain stage connected to an output of said processing stage to vary a value associated with said first or second detection conditions.

21. The electronic system of claim 18, wherein said electromechanical sensing structure is a uniaxial or a biaxial accelerometer.

22. The electronic system of claim 18, further comprising switch elements configured to connect electrically to one another insulated portions of a body of said mobile element in order to vary a value associated with said first or second detection conditions.

23. A microelectromechanical sensing structure comprising:

a mobile element adapted to be displaced as a function of a quantity to be detected;

first fixed elements capacitively coupled to said mobile element and configured to implement with said mobile element to provide first detection conditions of said quantity;

second fixed elements capacitively coupled to said mobile element and configured to implement with said mobile element to provide second detection conditions of said quantity, wherein said second detection conditions are different from said first detection conditions with respect to a full-scale value and a sensitivity value associated with detection of said quantity;

wherein said mobile element comprises a body extending substantially along a plane and being free to rotate about a tilting axis away from said plane, and said first and second fixed elements are underneath said plane and face said body, said first fixed elements having a first facing area that faces said body and positioned at a first distance from said tilting axis, said second fixed electrodes having a second facing area that faces said body and positioned at a second distance from said tilting axis, said first facing area and said first distance are different from said second facing area and said second distance, respectively, a lower value of said full scale and a higher value of said sensitivity correspond to said first or second fixed elements having a greater facing area and a greater distance from said tilting axis.