Electrochemical sensor compensated for relative humidity
First Claim
1. An electrochemical gas sensor comprising:
- a substrate having a surface;
a reference sensor having a first counter electrode, first sensing electrode, and first reference electrode deposited on said surface;
an active sensor having a second counter electrode, second sensing electrode, and second reference electrode deposited on said surface, said reference sensor and said active sensor being spaced apart from one another;
a first electrolytic material having a first thickness and being in contact with said first sensing electrode for carrying a flow of ions;
a second electrolytic material having a second thickness and being in contact with said second sensing electrode for carrying a flow of ions, said second thickness being less than said first thickness; and
additional electrolytic material in contact with active sensor and reference sensor, wherein said additional electrolytic material acts as a conductive medium to carry ions from the active sensor to the reference sensor.
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Abstract
The invention relates to an electrochemical gas sensor having both a reference sensor and an active sensor, whereby each reference and active sensor includes a substrate, a counter electrode deposited on a surface of the substrate, a sensing electrode also deposited on the surface, and a solid electrolytic material in electrical contact with both electrodes for carrying a flow of ions between them, which measures a concentration of a gas and compensates for relative humidity differences between sample gas and surrounding atmosphere. The sensor also includes a layer of solid electrolytic material on the sensing electrode of the reference sensor and a film of solid electrolytic material on the sensing electrode of the active sensor, whereby the layer is thicker than the film. The invention may further include a reference electrode in both the reference and active sensors for improving sensor accuracy and/or repeatability.
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Citations
21 Claims
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1. An electrochemical gas sensor comprising:
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a substrate having a surface; a reference sensor having a first counter electrode, first sensing electrode, and first reference electrode deposited on said surface; an active sensor having a second counter electrode, second sensing electrode, and second reference electrode deposited on said surface, said reference sensor and said active sensor being spaced apart from one another; a first electrolytic material having a first thickness and being in contact with said first sensing electrode for carrying a flow of ions; a second electrolytic material having a second thickness and being in contact with said second sensing electrode for carrying a flow of ions, said second thickness being less than said first thickness; and additional electrolytic material in contact with active sensor and reference sensor, wherein said additional electrolytic material acts as a conductive medium to carry ions from the active sensor to the reference sensor. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. An electrochemical gas sensor comprising:
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a first cell in communication with a second cell; each cell having; a substrate having a surface; an electrode being deposited on said surface, said electrode being both a counter and reference electrode; a first sensing electrode and a second sensing electrode, being spaced apart from one another and from said counter and reference electrode, being deposited on said surface; a first electrolytic material in contact with said first sensing electrode for carrying a flow of ions; a second electrolytic material in contact with said second sensing electrode for carrying a flow of ions; and additional electrolytic material in contact with the first sensing electrode and the second sensing electrode, wherein the additional electrolytic material acts as a conductive medium to carry ions from the second sensing electrode to the first sensing electrode. - View Dependent Claims (14, 15, 16, 17, 18)
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19. An electrochemical gas sensor comprising:
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a substrate having a surface; three electrodes, said electrodes comprising a counter/reference electrode, a first sensing electrode and a second sensing electrode, said counter/reference electrode, said first sensing electrode and said second sensing electrode being spaced apart from one another and deposited on said surface of said substrate; a first electrolytic material having a first thickness and being in contact with said first sensing electrode for carrying a flow of ions; a second electrolytic material having a second thickness and being in contact with said second sensing electrode for carrying a flow of ions, said second thickness being less than said first thickness; and additional electrolytic material in contact with the three electrodes, wherein the additional electrolytic material acts as a conductive medium to carry ions from the second sensing electrode to the first sensing electrode. - View Dependent Claims (20, 21)
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Specification