Focusing and positioning device for a particle-optical raster microscope
First Claim
1. A focusing and positioning ancillary device for a particle-optical raster microscope having an objective defining a particle-optical beam axis and an object table for accommodating an object thereon, the focusing and positioning ancillary device comprising:
- an illuminating unit configured to generate at least one of a collimated light beam and a focused light beam at a first angle to said particle-optical beam axis with said light beam having a wavelength and intercepting said particle-optical beam axis at a predefined position;
a camera sensitive to said wavelength and configured to record an image of said object positioned on said object table at a second angle relative to said particle-optical beam axis;
a display;
a control unit configured to cause said image recorded by said camera to be shown on said display together with a line-shaped marking indicating the position of said particle-optical beam axis in said image; and
,said line-shaped marking being displayed in said image on said display showing said line-shaped marking extending longer in length in the direction of said particle-optical axis than perpendicular to said particle-optical beam axis.
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Accused Products
Abstract
The invention relates to a focusing and positioning ancillary device for a particle-optical scanning microscope, a particle-optical scanning microscope including a corresponding positioning aid, and a method for focusing and positioning an object in a particle-optical scanning microscope. The focusing and positioning ancillary device includes an illuminating device, a camera, a display and a control unit. The illuminating device produces a collimated or focused light beam at an angle to the particle-optical beam axis which intersects the particle-optical beam axis at a predetermined position. The camera is sensitive to the wavelength of the light beam and records an image of the object, which is positioned on the object table, at a second angle to the particle-optical beam axis. The control unit produces an image captured by the camera on the display together with a marking which indicates the position of the particle-optical beam axis in the image.
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Citations
17 Claims
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1. A focusing and positioning ancillary device for a particle-optical raster microscope having an objective defining a particle-optical beam axis and an object table for accommodating an object thereon, the focusing and positioning ancillary device comprising:
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an illuminating unit configured to generate at least one of a collimated light beam and a focused light beam at a first angle to said particle-optical beam axis with said light beam having a wavelength and intercepting said particle-optical beam axis at a predefined position; a camera sensitive to said wavelength and configured to record an image of said object positioned on said object table at a second angle relative to said particle-optical beam axis; a display; a control unit configured to cause said image recorded by said camera to be shown on said display together with a line-shaped marking indicating the position of said particle-optical beam axis in said image; and
,said line-shaped marking being displayed in said image on said display showing said line-shaped marking extending longer in length in the direction of said particle-optical axis than perpendicular to said particle-optical beam axis. - View Dependent Claims (2, 3, 4, 5, 14, 17)
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6. A particle beam system comprising:
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an objective lens defining a particle-optical beam axis; a particle beam generator for generating a particle beam for travel along said particle-optical beam axis; a specimen chamber; an object table for accommodating an object thereon and said object table being mounted in said specimen chamber; a focusing and positioning ancillary device including; an illuminating unit configured to generate at least one of a collimated light beam and a focused light beam at a first angle to said particle-optical beam axis with said light beam having a wavelength and intercepting said particle-optical beam axis at a predefined position; a camera sensitive to said wavelength and configured to record an image of said object positioned on said object table at a second angle relative to said particle-optical beam axis; a display; a control unit configured to cause said image recorded by said camera to be shown on said display together with a line-shaped marking indicating the position of said particle-optical beam axis in said image; and
,said line-shaped marking being displayed in said image on said display showing said line-shaped marking extending longer in length in the direction of said particle-optical axis than perpendicular to said particle-optical beam axis. - View Dependent Claims (7, 8, 9, 10, 11, 15)
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12. A method of focusing and positioning an object in a particle-optical raster microscope including an objective defining a particle-optical beam axis and an object table, said method comprising the steps of:
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(a) providing a light beam having a predetermined wavelength and intersecting said particle-optical beam axis at a predefined position; (b) providing a camera sensitive to said wavelength; (c) providing a display whereon the position of said particle-optical beam axis is marked with a line-shaped marking; (d) recording an image of said object positioned on said object table via said camera; (e) positioning said object table in the direction of said particle-optical beam axis until said light beam intersects said object on said line-shaped marking in the image of said object shown on said display with said line-shaped marking extending longer in length in the direction of said particle-optical axis than perpendicular to said particle-optical beam axis; and
,(f) switching over said particle-optical raster microscope for irradiation of said object with electrons and displaying an image of said object via detected particles or light quanta generated by said irradiation of said object with charged particles. - View Dependent Claims (13, 16)
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Specification