Device for detecting stress migration properties

• US 7,888,672 B2
• Filed: 05/19/2005
• Issued: 02/15/2011
• Est. Priority Date: 11/23/2002
• Status: Expired due to Fees

• Current Assignee: Infineon Technologies AG
• Original Assignee: Infineon Technologies AG
• Inventors: von Glasow, Alexander, Fischer, Armin, von Hagen, Jochen
• Primary Examiner(s): Landau; Matthew C
• Assistant Examiner(s): Malek; Maliheh
• Application Number:
  US11/132,665
• Publication Number:
  US 20050211980A1
• Time in Patent Office: 2,098 Days
• Field of Search: 257/48, 257/E21.521, 257/E21.522, 257/E21.524, 257/E21.528, 324/537, 324/715, 324717-719, 324/760, 324/765, 324/158.1, 324/691, 324/713, 324/750, 438/14, 438 17- 18
• US Class Current: 257/48
• CPC Class Codes: H01L 22/34 Circuits for electrically characterising or monitoring manufacturing processes, e. g. whole test die, wafers filled with test structures, on-board-devices incorporated on each die, process control monitors or pad structures thereof, devices in scribe line switching, multiplexing, gating devices G01R19/25; process control with lithography, e.g. dose control, G03F7/20; structures for alignment control by optical means G03F7/70633
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/0002 Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Abstract

A device and method are provided for detecting stress migration properties of a semiconductor module mounted in a housing. A stress migration test (SMT) structure is formed in the semiconductor module. An integrated heating (IH) device is formed within or in direct proximity to the SMT structure. The SMT structure includes a first interconnect region in a first interconnect layer, a second interconnect region in a second interconnect layer, and a connecting region electrically connecting the interconnect regions through a first insulating layer. The IH device includes a heating interconnect region through which a heating current flows. The heating interconnect region is within or outside the first or second interconnect region or connecting region. When the heating current is applied, a measurement voltage is applied to the SMT structure, and a current through the SMT structure is measured to detect stress migration properties of the semiconductor module.

Claims

1. A device for detecting stress migration properties of a semiconductor module finally mounted in a product-relevant housing, the device comprising:

a stress migration test structure formed in the semiconductor module to detect the stress migration properties; and

an integrated heating device formed in the semiconductor module, the integrated heating device being formed within or in direct proximity to the stress migration test structure in the semiconductor module to locally heat the stress migration test structure;

wherein the stress migration test structure comprises a first interconnect region in a first interconnect layer, a second interconnect region in a second interconnect layer, and a connecting region electrically connecting the interconnect regions through a first insulating layer formed between the interconnect layers;

wherein the integrated heating device comprises a heating interconnect region through which a heating current flows, the heating interconnect region being outside the first or second interconnect region or connecting region, the heating interconnect region being formed in the first interconnect layer, the second interconnect layer or an interconnect layer adjoining the first or second interconnect region.

2. The device as claimed in claim 1, wherein at least one of a surface or a volume of the at least one of the first or second interconnect region is significantly larger than at least one of a surface or a volume of the connecting region.

3. The device as claimed in claim 1, wherein the product-relevant housing constitutes a plastic housing.

4. The device as claimed in claim 1, wherein the stress migration test structure comprises a multiplicity of first and second interconnect regions which are connected to one another in concatenated fashion by a multiplicity of connecting regions.

5. The device as claimed in claim 1, wherein the integrated heating device comprises a heating interconnect region through which a heating current flows, the heating interconnect region within the first or second interconnect region or connecting region.

6. The device as claimed in claim 5, wherein the heating current comprises a high alternating-current component.

7. The device as claimed in claim 1, wherein the integrated heating device comprises polysilicon or metal and the semiconductor module comprises a silicon semiconductor material.

8. The device as claimed in claim 1, further comprising a module carrier on which the semiconductor module is mounted.

9. The device as claimed in claim 8, further comprising a product-relevant housing around the mounted semiconductor module.

10. A semiconductor structure comprising:

a stress migration test structure formed in the semiconductor structure, the stress migration test structure comprising a first interconnect region in a first interconnect layer, a second interconnect region in a second interconnect layer on a different plane than the first interconnect layer, and a connecting region electrically connecting the interconnect regions through a first insulating layer formed between the interconnect layers; and

an integrated heating device formed in the semiconductor structure, the integrated heating device including a heating interconnect region through which a heating current flows, the integrated heating device being formed within or in direct proximity to the stress migration test structure, the heating interconnect region being formed in the first interconnect layer, the second interconnect layer or an interconnect layer adjoining the first or second interconnect region.

11. The semiconductor structure as claimed in claim 10, wherein the stress migration test structure comprises a multiplicity of first and second interconnect regions which are connected to one another in concatenated fashion by a multiplicity of connecting regions.

12. The semiconductor structure as claimed in claim 10, wherein the first interconnect region is one of a multiplicity of first interconnect regions and the multiplicity of first interconnect regions are connected by the second interconnect region.

13. The semiconductor structure as claimed in claim 12, wherein the first interconnect regions are each substantially larger than the second interconnect region.

14. The semiconductor structure as claimed in claim 11, wherein the integrated heating device is formed between opposing second interconnect regions of the multiplicity of second interconnect regions of the stress migration test structure.

15. The semiconductor structure as claimed in claim 10, wherein the integrated heating device is formed on an opposite side of the first interconnect region of the stress migration test structure as the second interconnect region of the stress migration test structure.

16. The semiconductor structure as claimed in claim 14, wherein another integrated heating device is formed on an opposite side of the first interconnect region of the stress migration test structure as the second interconnect region of the stress migration test structure.

17. The semiconductor structure as claimed in claim 10, wherein only the second interconnect region of the stress migration test structure is heated by a heating current of the integrated heating device.

18. The semiconductor structure as claimed in claim 10, wherein the first and second interconnect regions of the stress migration test structure and the connecting region of the stress migration test structure are all heated by a heating current of the integrated heating device.