Probing apparatus with impedance optimized interface

• US 7,888,957 B2
• Filed: 10/06/2008
• Issued: 02/15/2011
• Est. Priority Date: 10/06/2008
• Status: Active Grant

• Current Assignee: FormFactor Incorporated
• Original Assignee: Cascade Microtech Incorporated (FormFactor Incorporated)
• Inventors: Hayward, Roger, Smith, Kenneth R.
• Primary Examiner(s): Nguyen; Vinh P
• Application Number:
  US12/287,213
• Publication Number:
  US 20100085069A1
• Time in Patent Office: 862 Days
• Field of Search: None
• US Class Current: 324/754.07
• CPC Class Codes: G01R 1/06772 High frequency probes
• CPC Class Codes: G01R 1/07378 using an intermediate adapter, e.g. space transformers G01R1/07371 takes precedence

Abstract

In a membrane probing apparatus, the impedance of the interface between coaxial cables connected to the test instrumentation and the membrane supported co-planar waveguide that conductively connects to the probe'"'"'s contacts is optimized by eliminating a ground plane in the interface board.

Claims

1. A probing apparatus comprising:

(a) an interface board; and

(b) an interface board waveguide comprising a plurality of elongate conductive traces supported by said interface board including;

(i) a center trace having a first edge and a second edge defining a center trace width;

(ii) a first side trace spaced apart from said first edge of said center trace and having a first side trace width;

(iii) a second side trace spaced apart from said second edge of said center trace and having a second side trace width, said second side trace width differing from said center trace width; and

(c) a coaxial cable comprising;

(i) a center conductor arranged to conduct a first signal and conductively connected to said center trace of said interface board waveguide; and

(ii) a coaxial outer conductor conductively connecting said first side trace and said second side trace of said interface board waveguide to an electrical potential.

2. The probing apparatus of claim 1 wherein said first side trace width is substantially equal to said second side trace width.

3. The probing apparatus of claim 1 wherein said first side trace width differs from said second side trace width and said center trace width.

4. A probing apparatus comprising:

(a) an interface board;

(b) an interface board waveguide comprising a plurality of elongate conductive traces supported by said interface board including;

(i) a first center trace having a first edge and a second edge defining a first center trace width;

(ii) a first side trace spaced apart from said first edge of said first center trace and having a first side trace width; and

(iii) a second side trace spaced apart from said second edge of said first center trace and having a second side trace width, said second side trace width differing from said first center trace width;

(iv) a second center trace having a first edge spaced apart from second side trace and a second edge; and

(v) a third side trace spaced apart from said second edge of said second center trace;

(c) a first coaxial cable comprising;

(i) a center conductor arranged to conduct a first signal and conductively connected to said first center trace; and

(ii) a coaxial outer conductor conductively connecting said first side trace and said second side trace to an electrical potential; and

(d) a second coaxial cable comprising;

(i) a center conductor arranged to conduct a second signal and conductively connected to said second center trace; and

(ii) a coaxial outer conductor conductively interconnecting said second side trace and said third side trace.

5. The probing apparatus of claim 4 wherein said first side trace and said second side trace are connected to a first electrical potential and said second side trace and said third side trace are connected to a second electrical potential.

6. A probing apparatus comprising:

(a) a first waveguide comprising a plurality of elongate conductive traces supported by an interface board, said first waveguide including;

(i) a center trace having a first edge and a second edge defining a center trace width;

(ii) a first side trace spaced apart from said first edge of said center trace and having a first side trace width;

(iii) a second side trace spaced apart from said second edge of said center trace and having a second side trace width, said second side trace width differing from said center trace width; and

(c) a second waveguide comprising a plurality of elongate conductive traces including;

(i) a center trace including a surface portion arranged to overlap a surface portion of said center trace of said first waveguide ;

(ii) a first side trace including a surface portion arranged to overlap a portion of a surface of said first side trace of said first waveguide ; and

(iii) a second side trace including a surface portion arranged to overlap a portion of a surface of said second side trace of said first waveguide; and

(d) a center trace interconnect structure conductively interconnecting said overlapping surface portions of said center trace of said first waveguide and said center trace of said second waveguide, said center trace interconnect structure comprising a plurality of pads projecting from said overlapping surface portion of one of said center trace of said first waveguide and said center trace of said second waveguide including;

(i) a first pad located nearer a first edge than a second edge of said center trace from which first pad projects;

(ii) a second pad located nearer said first edge than said second edge of said center trace from which said first pad projects and spaced longitudinally apart from said first pad;

(iii) a third pad located nearer said second edge than said first edge of said center trace from which said first pad projects; and

(iv) a fourth pad located nearer said second edge than said first edge of said center trace from which said first pad projects and spaced longitudinally apart from said third pad;

(e) a first side trace interconnect structure conductively interconnecting said overlapping surface portion of said first side trace of said second waveguide and said surface of said first side trace of said first waveguide; and

(f) a second side trace interconnect structure conductively interconnecting said overlapping surface portion of said second side trace of said second waveguide and said surface of said second side trace of said first waveguide.

7. The probing apparatus of claim 6 wherein said center trace, said first side trace and said second side trace of said second waveguide are supported by a flexible membrane.

8. The probing apparatus of claim 6 wherein said first side trace width is substantially equal to said second side trace width.

9. The probing apparatus of claim 6 wherein said first side trace width differs from said second side trace width and said center trace width.

10. The probing apparatus of claim 6 wherein said first side trace interconnect structure comprises a plurality of pads projecting from said overlapping surface portion of said first side trace of said second waveguide into contact with said surface of said first side trace of said first waveguide, said pads including:

(a) a first pad located nearer a first edge of said first side trace of said second waveguide than a second edge of said first side trace of said second waveguide, said first edge of said first side trace being nearer said center trace of said second waveguide than said second edge of said first side trace;

(b) a second pad located nearer said first edge of said first side trace of said second waveguide than said second edge of said first side trace of said second waveguide and spaced longitudinally apart from said first pad;

(c) a third pad located nearer said second edge of said first side trace of said second waveguide than said first pad; and

(d) a fourth pad located nearer said second edge of said first side trace of said second waveguide than said first pad and spaced longitudinally apart from said third pad.

11. The probing apparatus of claim 6 wherein said first side trace interconnect structure comprises a plurality of pads projecting from said surface of said first side trace of said first waveguide into contact with said overlapping surface portion of said first side trace of said second waveguide, said pads including:

(a) a first pad located nearer a first edge of said first side trace of said first waveguide than a second edge of said first side trace of said first waveguide, said first edge of said first side trace being nearer said center trace of said first waveguide than said second edge of said first side trace;

(b) a second pad located nearer said first edge of said first side trace of said first waveguide than said second edge of said first side trace of said first waveguide and spaced longitudinally apart from said first pad;

(c) a third pad located nearer said second edge of said first side trace of said first waveguide than said first pad; and

(d) a fourth pad located nearer said second edge of said first side trace of said first waveguide than said first pad and spaced longitudinally apart from said third pad.

12. The probing apparatus of claim 6 further comprising a third waveguide comprising:

(a) an elongate conductive center trace supported by said interface board and having a first edge spaced apart from said second side trace of said first waveguide and a second edge; and

(b) an elongate conductive side trace supported by said interface board and spaced apart from said second edge of said center trace of said third waveguide.

13. The probing apparatus of claim 12 further comprising:

(a) a first coaxial cable comprising;

(i) a center conductor arranged to conduct a first signal and conductively connected to said center trace of said first waveguide; and

(ii) a coaxial outer conductor conductively connecting said first side trace of said first waveguide and said second side trace to an electrical potential; and

(b) a second coaxial cable comprising;

(i) a center conductor arranged to conduct a second signal and conductively connected to said center trace of said third waveguide; and

(ii) a coaxial outer conductor conductively interconnecting said second side trace and said side trace of said third waveguide.