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System and method for calculating aerial image of a spatial light modulator

  • US 7,889,411 B2
  • Filed: 05/22/2008
  • Issued: 02/15/2011
  • Est. Priority Date: 04/30/2004
  • Status: Expired due to Fees
First Claim
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1. A rasterization method for pixels of a spatial light modulator array, comprising:

  • pre-computing optical interferences between pixels of the spatial light modulator array in a partial coherent illumination; and

    computing at least one of an aerial image and a derivative of the aerial image based on the pre-computed optical interferences, without performing a rasterization computaton that modifies pixel states of the pixels of the spatial light modulator array.

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