Gas distribution plate assembly for plasma reactors
First Claim
1. A baffle plate assembly for distributing gas flows into an adjacent process chamber containing a semiconductor wafer to be processed, comprising:
- a single generally circular planar gas distribution portion having a plurality of apertures therein;
a flange surrounding the gas distribution portion; and
an apertureless impingement device centrally attached to the gas distribution portion, wherein the device includes a generally circular cap and a stem, the stem being in thermal contact with the gas distribution portion.
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Accused Products
Abstract
A baffle plate assembly for distributing gas flows into an adjacent process chamber containing a semiconductor wafer to be processed includes a planar gas distribution portion having a plurality of apertures therein; a flange surrounding the gas distribution portion; and an impingement device centrally attached to the gas distribution portion, wherein the device includes a cap and a stem, the stem being in thermal contact with the gas distribution portion. Also disclosed herein are plasma reactors employing the baffle plate assembly and methods for reducing recombination of species in a plasma.
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Citations
26 Claims
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1. A baffle plate assembly for distributing gas flows into an adjacent process chamber containing a semiconductor wafer to be processed, comprising:
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a single generally circular planar gas distribution portion having a plurality of apertures therein; a flange surrounding the gas distribution portion; and an apertureless impingement device centrally attached to the gas distribution portion, wherein the device includes a generally circular cap and a stem, the stem being in thermal contact with the gas distribution portion. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. A downstream plasma asher comprising:
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a plasma generator; a process chamber downstream from the plasma generator, the process chamber comprising an opening for receiving plasma from the plasma generator into the process chamber, and a substrate supported within the process chamber; and a baffle plate assembly intermediate the substrate and the process chamber opening for distributing plasma flow in the process chamber, the baffle plate assembly comprising a single generally circular planar gas distribution portion having a plurality of apertures therein;
a flange surrounding the gas distribution portion; and
an apertureless impingement device centrally attached to the gas distribution portion, wherein the device includes a generally circular cap and a stem, the cap having a diameter about equal to a diameter of the process chamber opening and the stem in thermal contact with the gas distribution portion. - View Dependent Claims (14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26)
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Specification