Thermal liquid flow sensor and method of forming same
First Claim
1. A thermal liquid flow sensor, comprising:
- a microsensor die comprising;
a substrate;
a heater disposed on said substrate;
at least one pair of temperature sensing elements disposed on said substrate; and
a hydrophilic layer comprising a fluorine-containing polymer, said fluorine-containing polymer having a hydrophilic functional group, and said hydrophilic layer being disposed on a surface region of said sensor die, said hydrophilic layer covering said at least one said temperature sensing elements and/or said heater.
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Abstract
A thermal liquid flow sensor and method of forming same. The sensor has a substrate and one or more sensing elements, disposed on the substrate, for sensing a property of a liquid. The liquid flow sensor, which can be for example a microsensor having a microbrick® structure, has a hydrophilic layer which is disposed on the substrate and covers the sensing element(s). The hydrophilic layer is preferably formed from a spin on glass material, such as for example a silicate or phosphosilicate. A silicon nitride layer can be disposed on the sensing element(s) and interpose the substrate and the hydrophilic layer. The silicon nitride layer can be oxidized, for example, by means of plasma oxidation or oxygen ion implantation so to form the hydrophilic layer thereon. A variety of other hydrophilic compounds can be utilized to form the hydrophilic layer such as, gold, palladium and diamond like carbon.
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Citations
9 Claims
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1. A thermal liquid flow sensor, comprising:
a microsensor die comprising; a substrate; a heater disposed on said substrate; at least one pair of temperature sensing elements disposed on said substrate; and a hydrophilic layer comprising a fluorine-containing polymer, said fluorine-containing polymer having a hydrophilic functional group, and said hydrophilic layer being disposed on a surface region of said sensor die, said hydrophilic layer covering said at least one said temperature sensing elements and/or said heater. - View Dependent Claims (2, 3, 4, 5)
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6. A thermal liquid flow sensor, comprising:
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a microsensor die comprising; a substrate; a heater disposed on said substrate; at least one pair of temperature sensing elements disposed on said substrate; wherein said sensor die is fabricated in the form of a microfill structure providing a substantially solid structure beneath said temperature elements and said heater; and a hydrophilic layer comprising a fluorine-containing polymer, said fluorine-containing polymer having a hydrophilic functional group, and said hydrophilic layer being disposed on a surface region of said sensor die, said hydrophilic layer covering said at least one said temperature sensing elements and/or said heater. - View Dependent Claims (7, 8, 9)
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Specification