Membrane probing structure with laterally scrubbing contacts
First Claim
1. A structure suitable for use with a probe for probing an electrical device, said structure comprising:
- (a) an elastic membrane; and
(b) a plurality of rigid contacts each supported by an elongate portion of a first surface of said elastic membrane and having a contacting portion located nearer a first end of said elongate portion than a second end of said elongate portion, displacement of said respective elongate portion relative to a second surface of said elastic membrane when said respective contacting portion is pressed into engagement with said electrical device causing said respective contact to tilt and said contacting portion to scrub laterally across said electrical device.
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0 Petitions
Accused Products
Abstract
A membrane probing assembly includes a support element having an incompressible forward support tiltably coupled to a rearward base and a membrane assembly, formed of polyimide layers, with its central region interconnected to the support by an elastomeric layer. Flexible traces form data/signal lines to contacts on the central region. Each contact comprises a rigid beam and a bump located in off-centered location on the beam, which bump includes a contacting portion. After initial touchdown of these contacting portions, further over-travel of the pads causes each beam to independently tilt locally so that different portions of each beam move different distances relative to the support thus driving each contact into lateral scrubbing movement across the pad thereby clearing away oxide buildup. The elastomeric member backed by the incompressible support ensures sufficient scrub pressure and reliable tilt recovery of each contact without mechanical straining of the beam. In an alternative embodiment, the contacts comprise conductive beams each supported on a loose U-shaped flap formed in the membrane assembly where each flap and beam is tiltably supported in inclined position by an elastomeric hub interposed between the flap and support.
944 Citations
34 Claims
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1. A structure suitable for use with a probe for probing an electrical device, said structure comprising:
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(a) an elastic membrane; and (b) a plurality of rigid contacts each supported by an elongate portion of a first surface of said elastic membrane and having a contacting portion located nearer a first end of said elongate portion than a second end of said elongate portion, displacement of said respective elongate portion relative to a second surface of said elastic membrane when said respective contacting portion is pressed into engagement with said electrical device causing said respective contact to tilt and said contacting portion to scrub laterally across said electrical device. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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- 18. A structure suitable for use with a probe for probing an electrical device, said structure comprising a plurality of rigid contacts each of which defines a surface backed by a resilient pad and a contacting portion which is spaced apart from a midpoint of a length of said surface and spatially arranged for engagement with said electrical device, said contact pivoting about an axis of moment when said contacting portion is pressed into engagement with said electrical device and a restoring force is exerted on said surface by said resilient pad, said pivoting of said contact producing lateral movement of said contacting portion across said electrical device.
Specification