Electro-optical measurement of hysteresis in interferometric modulators

• US 7,894,076 B2
• Filed: 02/14/2008
• Issued: 02/22/2011
• Est. Priority Date: 09/27/2004
• Status: Expired due to Fees

• Current Assignee: Snaptrack Incorporated (Qualcomm, Inc.)
• Original Assignee: Qualcomm MEMS Technologies Incorporated (Qualcomm, Inc.)
• Inventors: Cummings, William J, Gally, Brian
• Primary Examiner(s): LEE, HWA S
• Application Number:
  US12/031,602
• Publication Number:
  US 20080180680A1
• Time in Patent Office: 1,104 Days
• Field of Search: 356/519, 356/512
• US Class Current: 356/512
• CPC Class Codes: G02B 26/001 based on interference in an adjustable optical cavity interference filters G02B5/28; devices or arrangements using multiple reflections in spectrometry or monochromators G01J3/26

Abstract

Disclosed herein are methods and apparatus for testing interferometric modulators. The interferometric modulators may be tested by applying a time-varying voltage stimulus and measuring the resulting reflectivity from the modulators.

Claims

1. A method of determining electrical parameters for driving a plurality of interferometric modulators, comprising:

applying a time-varying voltage stimulus to a plurality of interferometric modulators which are stable in an actuated state and a non-actuated state, wherein the time-varying voltage stimulus includes positive voltages higher than a positive actuation potential of the interferometric modulators and negative voltages lower than a negative actuation potential of the interferometric modulators;

detecting reflectivity of light from the interferometric modulators; and

determining one or more electrical parameters from said reflectivity of light in response to said time-varying voltage stimulus, the electrical parameters comprising an amplitude of an offset voltage in the interferometric modulators.

2. The method of claim 1, wherein determining comprises determining a voltage necessary to cause the interferometric modulators to change from the non-actuated to the actuated state.

3. The method of claim 1, wherein determining comprises determining a voltage necessary to cause the interferometric modulators to change from the actuated state to the non-actuated state.

4. The method of claim 1, wherein determining comprises determining amplitude of a bias voltage in the interferometric modulators.

5. The method of claim 1, wherein determining comprises determining amplitude of a memory window in the interferometric modulators.

6. The method of claim 1, wherein determining comprises:

normalizing the reflectivity to one or more pre-determined values; and

determining potentials where the normalized reflectivity crosses zero.

7. A system for testing a plurality of interferometric modulators, comprising:

an illumination source adapted to provide incident light to a plurality of interferometric modulators;

a voltage source adapted to apply voltages to a plurality of interferometric modulators which are stable in an actuated state and a non-actuated state, the voltages including at least one positive voltage higher than a positive actuation potential of the interferometric modulators and at least one negative voltage lower than a negative actuation potential of the interferometric modulators;

an optical detector adapted to detect light reflected from the plurality of interferometric modulators; and

a computer adapted to determine one or more electrical parameters from said detected light, the electrical parameters comprising an amplitude of an offset voltage in the interferometric modulators.

8. The system of claim 7, wherein the illumination source provides incident light at an angle that is substantially perpendicular to the interferometric modulators.

9. The system of claim 7, wherein the voltage source is simultaneously electrically connected to all interferometric modulators in a reflective display.

10. The system of claim 7, wherein the voltage source is adapted to apply a time-varying voltage waveform.

11. The system of claim 10, wherein the voltage source is adapted to apply a triangular voltage waveform.

12. The system of claim 7, wherein the optical detector is a photo detector.

13. The system of claim 7, wherein the optical detector is adapted to detect light from less than all interferometric modulators in a reflective display.

14. The system of claim 7, wherein the optical detector is adapted to detect light at an angle that is substantially perpendicular to the interferometric modulators.

15. The system of claim 7, wherein the optical detector is adapted to detect light through a diffuser.

16. The system of claim 7, further including a filter disposed in front of the optical detector.

17. A method of testing a plurality of interferometric modulators, comprising:

applying a time-varying voltage waveform to a plurality of interferometric modulators which are stable in an actuated state and a non-actuated state, wherein the time-varying voltage waveform includes positive voltages higher than a positive actuation potential of the interferometric modulators and negative voltages lower than a negative going actuation of the interferometric modulators;

detecting reflectivity of light from the interferometric modulators;

repeating said applying and detecting steps one or more times;

averaging at least a portion of the detected reflectivity; and

determining one or more electrical parameters from said averaged reflectivity, the electrical parameters comprising an amplitude of an offset voltage in the interferometric modulators.

18. A method of testing a color interferometric modulator display, the display comprising a plurality of sub-pixel types, each sub-pixel type corresponding to a different color, the method comprising:

applying a time-varying voltage waveform to one sub-pixel type, wherein the time-varying voltage waveform includes positive voltages higher than a positive actuation potential of interferometric modulators in the display which are stable in an actuated state and a non-actuated state and negative voltages lower than a negative actuation potential of the interferometric modulators;

detecting reflectivity of light from said sub-pixel type;

determining one or more electrical parameters from said detecting, the electrical parameters comprising an amplitude of an offset voltage in the interferometric modulators; and

repeating said applying, detecting, and determining steps for another sub-pixel type.

19. A system for testing a plurality of interferometric modulators, comprising:

means for applying a time-varying voltage waveform to a plurality of interferometric modulators which are stable in an actuated state and a non-actuated state, wherein the time-varying voltage waveform includes positive voltages higher than a positive actuation potential of the interferometric modulators and negative voltages lower than a negative actuation potential of the interferometric modulators;

means for detecting reflectivity of light from the interferometric modulators; and

means for determining one or more electrical parameters based on said detected reflectivity, the electrical parameters comprising an amplitude of an offset voltage in the interferometric modulators.

20. The method of claim 19, wherein the means for applying a time-varying voltage waveform is a voltage source.

21. The method of claim 19, wherein the means for detecting reflectivity is a photo detector.

22. The method of claim 19, wherein the means for determining one or more parameters is a computer.