Sensor-equipped joint member
First Claim
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1. A fluid control apparatus comprising:
- a plurality of fluid control devices; and
a plurality of fluid joint members, being separate components from the plurality of fluid control devices, provided with a channel for communicating adjacent fluid control devices to each other at their lower-end openings, whereinat least one of the fluid joint members is a block-shaped joint member provided with a pressure sensor, said pressure sensor being a separate component from the at least one of the fluid joint members, and a communication channel for communicating adjacent fluid control devices to each other at their lower-end openings;
the communication channel being one of U-shaped and V-shaped, a branched channel which is branched from the communication channel and is communicated to the pressure sensor and a pressure sensor mounting recessed portion.
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Abstract
The present invention provides a joint member which suppresses the increase of the number of members and enables the provision of a further compactified integrated fluid control apparatus.
A sensor-equipped joint member 10 includes a channel block 41 including a V-shaped channel 41a formed therein for communicating adjacent fluid control devices 16 and 20 to each other at their lower-end openings, and a pressure sensor 42 provided on a side surface of the channel block 41. The channel block 41 is provided with a branched channel 41b which is branched from the V-shaped channel 41a and is communicated to the pressure sensor 42.
20 Citations
11 Claims
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1. A fluid control apparatus comprising:
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a plurality of fluid control devices; and a plurality of fluid joint members, being separate components from the plurality of fluid control devices, provided with a channel for communicating adjacent fluid control devices to each other at their lower-end openings, wherein at least one of the fluid joint members is a block-shaped joint member provided with a pressure sensor, said pressure sensor being a separate component from the at least one of the fluid joint members, and a communication channel for communicating adjacent fluid control devices to each other at their lower-end openings;
the communication channel being one of U-shaped and V-shaped, a branched channel which is branched from the communication channel and is communicated to the pressure sensor and a pressure sensor mounting recessed portion. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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Specification