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Sensor-equipped joint member

  • US 7,896,030 B2
  • Filed: 08/26/2005
  • Issued: 03/01/2011
  • Est. Priority Date: 09/16/2004
  • Status: Expired due to Fees
First Claim
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1. A fluid control apparatus comprising:

  • a plurality of fluid control devices; and

    a plurality of fluid joint members, being separate components from the plurality of fluid control devices, provided with a channel for communicating adjacent fluid control devices to each other at their lower-end openings, whereinat least one of the fluid joint members is a block-shaped joint member provided with a pressure sensor, said pressure sensor being a separate component from the at least one of the fluid joint members, and a communication channel for communicating adjacent fluid control devices to each other at their lower-end openings;

    the communication channel being one of U-shaped and V-shaped, a branched channel which is branched from the communication channel and is communicated to the pressure sensor and a pressure sensor mounting recessed portion.

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