Multi-axial angular velocity sensor
First Claim
1. An angular velocity sensor for detecting an angular velocity component about a Z-axis in an XYZ three-dimensional coordinate system, said sensor comprising:
- an oscillator made of a substrate with an enough thickness to obtain a mass sufficient to provide the sensor with a required sensitivity;
a sensor casing for accommodating the oscillator therewithin;
a flexible member for connecting the oscillator to the sensor casing so that the oscillator can be moved with respect to the sensor casing;
a driving device for oscillating the oscillator in an X-axis direction in said coordinate system; and
a detection device for detecting a deviation of the oscillator in a Y-axis direction in said coordinate system;
wherein a detection value of said detection device is output as a value indicating an angular velocity component about the Z-axis, and the oscillator and the flexible member are made of silicon.
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Abstract
A flexible substrate having flexibility and a fixed substrate disposed to oppose it are supported at their peripheral portions by a sensor casing. An oscillator is fixed on the lower surface, and five lower electrode layers are formed on the upper surface, of the flexible substrate. Five upper electrode layers are formed on the lower surface of the fixed substrate so as to oppose the lower electrodes. In detecting an angular velocity ωx about the X-axis, an a.c. voltage is applied across a predetermined pair of opposite electrode layers to allow the oscillator to undergo oscillation Uz in the Z-axis direction. By change of capacitance, it is possible to detect the magnitude of the Coriolis force Fy, and determine angular velocity ωx Similarly, it is possible to detect an angular velocity ωy about the Y-axis and an angular velocity ωz about the Z-axis.
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Citations
7 Claims
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1. An angular velocity sensor for detecting an angular velocity component about a Z-axis in an XYZ three-dimensional coordinate system, said sensor comprising:
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an oscillator made of a substrate with an enough thickness to obtain a mass sufficient to provide the sensor with a required sensitivity; a sensor casing for accommodating the oscillator therewithin; a flexible member for connecting the oscillator to the sensor casing so that the oscillator can be moved with respect to the sensor casing; a driving device for oscillating the oscillator in an X-axis direction in said coordinate system; and a detection device for detecting a deviation of the oscillator in a Y-axis direction in said coordinate system; wherein a detection value of said detection device is output as a value indicating an angular velocity component about the Z-axis, and the oscillator and the flexible member are made of silicon. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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Specification