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Multi-axial angular velocity sensor

  • US 7,900,513 B2
  • Filed: 03/13/2008
  • Issued: 03/08/2011
  • Est. Priority Date: 03/30/1993
  • Status: Expired due to Fees
First Claim
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1. An angular velocity sensor for detecting an angular velocity component about a Z-axis in an XYZ three-dimensional coordinate system, said sensor comprising:

  • an oscillator made of a substrate with an enough thickness to obtain a mass sufficient to provide the sensor with a required sensitivity;

    a sensor casing for accommodating the oscillator therewithin;

    a flexible member for connecting the oscillator to the sensor casing so that the oscillator can be moved with respect to the sensor casing;

    a driving device for oscillating the oscillator in an X-axis direction in said coordinate system; and

    a detection device for detecting a deviation of the oscillator in a Y-axis direction in said coordinate system;

    wherein a detection value of said detection device is output as a value indicating an angular velocity component about the Z-axis, and the oscillator and the flexible member are made of silicon.

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