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Micro-electromechanical nozzle arrangement with an actuating mechanism having a shutter member

  • US 7,901,047 B2
  • Filed: 11/11/2008
  • Issued: 03/08/2011
  • Est. Priority Date: 07/15/1997
  • Status: Expired due to Fees
First Claim
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1. A micro-electromechanical nozzle arrangement for an inkjet printer, said arrangement comprising:

  • a substrate having a layer of drive circuitry disposed thereon with a passivation layer on top of the drive circuitry layer, the substrate defining an ink inlet channel comprised of a number of discrete openings;

    a roof portion supported on the passivation layer by means of chamber walls to define an ink chamber operatively supplied with ink via the inlet channel, said roof portion defining an ink ejection port; and

    an actuating mechanism located inside said chamber, the mechanism including a shutter member displaceable to obstruct fluid flow between the inlet channel and the ejection port or to allow fluid movement between the inlet channel and the ejection port, respectively.

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