Deposition-plasma cure cycle process to enhance film quality of silicon dioxide
First Claim
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1. A method of filling a gap on a substrate with silicon oxide, the method comprising:
- introducing an organo-silicon precursor and an oxygen precursor to a deposition chamber;
reacting the precursors to form a first silicon oxide layer in the gap on the substrate;
etching the first silicon oxide layer to reduce the carbon content in the layer;
forming a second silicon oxide layer on the first layer, and etching the second layer to reduce the carbon content in the layer, wherein the etching operation of the first and second silicon oxide layers comprises;
exposing the layer to a first plasma having a first density, wherein the first plasma dissociates larger carbon molecules in the layer, andexposing the layer to a second plasma having a second density that is higher than the first density, wherein the second plasma dissociates silicon-hydroxide bonds in the layer; and
annealing the silicon oxide layers after the gap is filled.
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Abstract
Methods of filling a gap on a substrate with silicon oxide are described. The methods may include the steps of introducing an organo-silicon precursor and an oxygen precursor to a deposition chamber, reacting the precursors to form a first silicon oxide layer in the gap on the substrate, and etching the first silicon oxide layer to reduce the carbon content in the layer. The methods may also include forming a second silicon oxide layer on the first layer, and etching the second layer to reduce the carbon content in the second layer. The silicon oxide layers are annealed after the gap is filled.
208 Citations
30 Claims
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1. A method of filling a gap on a substrate with silicon oxide, the method comprising:
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introducing an organo-silicon precursor and an oxygen precursor to a deposition chamber; reacting the precursors to form a first silicon oxide layer in the gap on the substrate; etching the first silicon oxide layer to reduce the carbon content in the layer; forming a second silicon oxide layer on the first layer, and etching the second layer to reduce the carbon content in the layer, wherein the etching operation of the first and second silicon oxide layers comprises; exposing the layer to a first plasma having a first density, wherein the first plasma dissociates larger carbon molecules in the layer, and exposing the layer to a second plasma having a second density that is higher than the first density, wherein the second plasma dissociates silicon-hydroxide bonds in the layer; and annealing the silicon oxide layers after the gap is filled. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19)
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20. A method of forming a multilayer silicon oxide film on a substrate, the method comprising:
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forming a plurality of silicon oxide layers on the substrate, wherein each silicon oxide layer has a thickness of about 100 Å
to about 200 Å
, and wherein each layer is formed by;(i) introducing an organo-silicon precursor and an atomic oxygen precursor to a reaction chamber, (ii) reacting the precursors to form the layer on the substrate, and (iii) etching the layer to reduce impurities in the layer, wherein the etching of the layer comprises; exposing the layer to a first plasma having a first density, wherein the first plasma dissociates larger carbon molecules in the layer, and exposing the layer to a second plasma having a second density that is higher than the first density, wherein the second plasma dissociates silicon-hydroxide bonds in the layer; and annealing the plurality of layers. - View Dependent Claims (21, 22, 23, 24, 25, 26, 27, 28, 29, 30)
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Specification