Composition for an etching mask comprising a silicon-containing material

• US 7,906,180 B2
• Filed: 08/23/2006
• Issued: 03/15/2011
• Est. Priority Date: 02/27/2004
• Status: Active Grant

• Current Assignee: Mii Newco, Inc. (Canon Inc.)
• Original Assignee: Molecular Imprints, Inc. (Canon Inc.)
• Inventors: Xu, Frank Y., Miller, Michael N., Watts, Michael P. C.
• Primary Examiner(s): Zimmer; Marc S
• Application Number:
  US11/508,765
• Publication Number:
  US 20080097065A1
• Time in Patent Office: 1,665 Days
• Field of Search: None
• US Class Current: 427/387
• CPC Class Codes: B82Y 10/00 Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
• CPC Class Codes: B82Y 40/00 Manufacture or treatment of nanostructures
• CPC Class Codes: G03F 7/0002 Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping

Abstract

The present invention includes a composition for a silicon-containing material used as an etch mask for underlying layers. More specifically, the silicon-containing material may be used as an etch mask for a patterned imprinted layer comprising protrusions and recessions. To that end, in one embodiment of the present invention, the composition includes a hydroxyl-functional silicone component, a cross-linking component, a catalyst component, and a solvent. This composition allows the silicon-containing material to selectively etch the protrusions and the segments of the patterned imprinting layer in superimposition therewith, while minimizing the etching of the segments in superposition with the recessions, and therefore allowing an in-situ hardened mask to be created by the silicon-containing material, with the hardened mask and the patterned imprinting layer forming a substantially planarized profile.

Claims

1. A composition operable for forming a layer on a surface, the composition comprising:

a solid hydroxyl-functional silicone T-resin component having the general formula RSiO_1.5, wherein R is selected from the group consisting of hydroxyl, methyl, phenyl, propyl, and combinations thereof, the T-resin component having silicon atoms associated therewith;

a cross-linking component;

a catalyst component; and

a solvent component,

wherein the catalyst component catalyzes a condensation reaction between the cross-linking component and the silicone T-resin component to form Si—

O—

C bonds in a cross-linked polymer material in response to thermal energy, and

wherein the silicon atoms of the T-resin component comprise at least 5% by weight of the cross-linked polymer material.

2. The composition as recited in claim 1 wherein the silicon atoms in the composition comprise at least 5% by weight of the silicone T-resin component, the cross-linking component, and the catalyst component.

3. The composition as recited in claim 1 wherein the silicone resin component is approximately 4% by weight of the composition, the cross-linking component is approximately 0.95% by weight of the composition, the catalyst component is approximately 0.05% by weight of the composition, and the solvent component is approximately 95% by weight of the composition.

4. The composition as recited in claim 1 further including an epoxy-functional silane component, wherein the silicone resin component is approximately 4% by weight of the composition, the cross-linking component is approximately 0.7% by weight of the composition, the epoxy-functional silane component is approximately 0.25% by weight of the composition, the catalyst component is approximately 0.05% by weight of the composition, and the solvent component is approximately 95% by weight of the composition.

5. The composition as recited in claim 1 wherein the cross-linking component includes an aminoplast crosslinker.

6. The composition as recited in claim 1 wherein the cross-linking component includes hexamethoxymethylmelamine.

7. The composition as recited in claim 1 wherein the catalyst component includes an acidic compound.

8. The composition as recited in claim 1 wherein the catalyst component includes toluenesulfonic acid.

9. The composition as recited in claim 4 wherein the solvent component is from a set consisting of alcohol, ether, glycol, glycol ether, methyl amyl ketone, ester, and acetate.

10. The composition as recited in claim 4 wherein the epoxy-functional silane component is selected from a set consisting of glycidoxypropyltrihydroxysilane, 3-glycidoxy-propyldimethylhydroxysilane, 3-glycidoxypropyltrimethoxysilane, 2,3-epoxypropyltrimethoxy-silane, and gamma-glycidoxypropyltrimethoxysilane.

11. The composition as recited in claim 1 wherein the composition is solidifiable as a result of thermal exposure.

12. The composition as recited in claim 1 wherein the composition is solidifiable as a result of centrifugation and thermal exposure.

13. The composition as recited in claim 1 wherein the solvent is propylene glycol methyl ether acetate.

14. A substrate having coated thereon the composition of claim 1, wherein after coating the substrate and curing the composition, the silicon atom content in the coating is in a range of 10%-20% by weight.

15. A substrate having coated thereon the composition of claim 1, wherein after coating the substrate and curing the composition, the silicon atom content in the coating is greater than 20% by weight.

16. A composition operable for forming a layer on a surface, the composition comprising:

a solid silicone T-resin component, having silicon atoms associated therewith, wherein the solid silicone T-resin component is a hydroxyl-functional silsesquioxane having the general formula RSiO_1.5, wherein R is selected from the group consisting of hydroxyl, methyl, phenyl, propyl, and combinations thereof;

a cross-linking component, wherein the cross-linking component is hexamethoxymethylmelamine;

a catalyst component, wherein the catalyst component is toluene sulfonic acid; and

a solvent component, wherein the solvent component is propylene glycol methyl ether acetate.

17. The composition as recited in claim 16 wherein the solid silicone T-resin component is approximately 4% by weight of the composition, the cross-linking component is approximately 0.95% by weight of the composition, the catalyst component is approximately 0.05% by weight of the composition, and the solvent component is approximately 95% by weight of the composition.

18. A composition operable for forming a layer on a surface, the composition comprising:

a hydroxyl-functional silsesquioxane having the general formula RSiO_1.5, wherein R is selected from the group consisting of hydroxyl, methyl, phenyl, propyl, and combinations thereof;

hexamethoxymethylmelamine;

toluene sulfonic acid; and

propylene glycol methyl ether acetate.

19. A method for forming a layer on a surface, the method comprising:

depositing a composition on the surface, the composition comprising;

a solid hydroxyl-functional silicone T-resin component having the general formula RSiO_1.5, wherein R is selected from the group consisting of hydroxyl, methyl, phenyl, propyl, and combinations thereof, the T-resin component having silicon atoms associated therewith;

a cross-linking component;

an acidic catalyst component; and

a solvent component,

wherein the catalyst component catalyzes a condensation reaction between the cross-linking component and the silicone T-resin component to form a cross-linked polymer material in response to thermal energy; and

then exposing the composition to thermal energy to form the cross-linked polymer material on the surface, wherein the silicon atoms of the T-resin component comprise at least 5% by weight of the cross-linked polymer material.