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Control methods for micromirror devices implemented with a single address electrode

  • US 7,907,325 B2
  • Filed: 02/25/2008
  • Issued: 03/15/2011
  • Est. Priority Date: 02/26/2007
  • Status: Expired due to Fees
First Claim
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1. A method for controlling a micromirror device including a plurality of mirror elements each comprising a micromirror supported on a substrate by an elastic hinge, and an address electrode arranged across a deflection axis of the micromirror, comprisingdeflecting the micromirror by changing a potential to a predetermined waveform for at least one address electrode;

  • andwherein the potential is changed to a predetermined waveform by applying the potential having a pulse waveform at a predetermined operational time of the micromirror.

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