Laser processing apparatus using distinct horizontal and vertical data sets
First Claim
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1. A laser processing apparatus, comprising:
- a laser source;
a spatial phase modulator configured to modulate a phase of a laser beam emitted from the laser source;
a focusing optical unit configured to guide the phase-modulated laser beam onto a surface to be processed to reproduce a pattern image on the processed surface;
a computer configured to calculate separately a horizontal hologram data set representing displacement of the pattern image in a direction parallel to the processed surface and a vertical hologram data set representing displacement of the pattern image in a direction perpendicular to the processed surface, the horizontal hologram data set and the vertical hologram data set being distinct from each other; and
a synthetic data generator configured to generate synthetic data by combining hologram image data representing the pattern image to be processed with position displacement hologram data for shifting the pattern image to a prescribed position, said position displacement hologram data including either the horizontal hologram data set, the vertical hologram data set, or a combination of the horizontal and vertical hologram data sets, said synthetic data being input to the spatial phase modulator for the phase modulation of the laser beams.
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Abstract
A laser processing apparatus includes a laser source (11), a spatial phase modulator (13) configured to modulate a phase of a laser beam emitted from the laser source, a synthetic data generator (17) configured to generate synthetic data by combining hologram image data representing a pattern image to be processed with position displacement hologram data for shifting the pattern image to a prescribed position, the synthetic data being input to the spatial phase modulator for the phase modulation of the laser beams, and a focusing optical unit (14) configured to guide the phase-modulated laser beam onto a surface to be processed to reproduce the pattern image on the processed surface.
16 Citations
18 Claims
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1. A laser processing apparatus, comprising:
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a laser source; a spatial phase modulator configured to modulate a phase of a laser beam emitted from the laser source; a focusing optical unit configured to guide the phase-modulated laser beam onto a surface to be processed to reproduce a pattern image on the processed surface; a computer configured to calculate separately a horizontal hologram data set representing displacement of the pattern image in a direction parallel to the processed surface and a vertical hologram data set representing displacement of the pattern image in a direction perpendicular to the processed surface, the horizontal hologram data set and the vertical hologram data set being distinct from each other; and a synthetic data generator configured to generate synthetic data by combining hologram image data representing the pattern image to be processed with position displacement hologram data for shifting the pattern image to a prescribed position, said position displacement hologram data including either the horizontal hologram data set, the vertical hologram data set, or a combination of the horizontal and vertical hologram data sets, said synthetic data being input to the spatial phase modulator for the phase modulation of the laser beams. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 18)
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13. A laser processing method, comprising:
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calculating hologram image data representing a pattern image to be processed on a object; generating position displacement data for shifting the pattern image to a prescribed position with respect to a processed surface of the object; combining the hologram image data with the position displacement data to produce synthetic hologram data; modulating a phase of a laser beam using the synthetic hologram data; and guiding the phase-modulated laser beam onto the processed surface using an optical system, wherein said position displacement data includes either a horizontal hologram data set representing displacement in a direction parallel to the processed surface, a vertical hologram data set representing displacement in a direction perpendicular to the processed surface, or a combination of the horizontal and vertical hologram data sets, and wherein the horizontal data set and the vertical data set are distinct from each other and calculated separately. - View Dependent Claims (14)
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15. A computer readable storage medium encoded with a computer readable program configured to cause an information processing apparatus to execute a method, the method comprising:
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calculating hologram image representing a pattern image to be processed on an object; generating position displacement data for shifting the pattern image to a prescribed position with respect to a processed surface of the object; combining the hologram image data with the position displacement data to produce synthetic hologram data; and inputting the synthetic hologram data to a phase modulator to control phase modulation performed on a laser beam, wherein said position displacement data includes either a horizontal hologram data set representing displacement in a direction parallel to the processed surface, a vertical hologram data set representing displacement in a direction perpendicular to the processed surface, or a combination of the horizontal and vertical hologram data sets, and wherein the horizontal data set and the vertical data set are distinct from each other and calculated separately. - View Dependent Claims (16, 17)
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Specification