Micro-electro-mechanical-system micromirrors for high fill factor arrays and method therefore
First Claim
1. A micro-electro-mechanical-system micromirror for use in high fill factor arrays, comprising:
- at least one stationary body;
a movable body having opposed sides and being secured to the stationary body at each of the opposed sides by a resilient primary axis pivot;
a mirror support supported by and movable with the movable body, the mirror support having a first unfettered side and a second unfettered side;
a primary axis actuator comprising a fixed portion connected to the stationary body, and a movable portion connected to the movable body, the movable portion being movable relative to the fixed portion in response to an electrical potential difference between the fixed portion and the movable portion, such that the movable body rotates about the primary axis resilient pivot;
a secondary axis resilient pivot positioned between the mirror support and the movable body;
a secondary axis actuator, the secondary axis actuator comprising a fixed portion connected to the movable body, and a movable portion connected to the mirror support, the movable portion moving away from the fixed portion in response to an electrical potential difference between the fixed portion and the movable portion, such that the mirror support rotates about the secondary axis resilient pivot; and
a mirror supported by the mirror support.
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Accused Products
Abstract
A micro-electro-mechanical-system (MEMS) micromirror for use in high fill factor arrays which includes at least one stationary body and a movable body. The movable body has opposed ends and is secured to the stationary body at each of the opposed ends by a resilient primary axis pivot. A mirror support is supported by and movable with the movable body. The mirror support has a first unfettered side and a second unfettered side. A primary axis actuator is provided including a fixed portion connected to the stationary body, and a movable portion corrected to the movable body. The movable portion is adapted to move away from the fixed portion in response to an electrical potential difference between the fixed portion and the movable portion, such that the movable body rotates about the primary axis resilient pivot. A mirror is supported by the mirror support.
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Citations
20 Claims
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1. A micro-electro-mechanical-system micromirror for use in high fill factor arrays, comprising:
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at least one stationary body; a movable body having opposed sides and being secured to the stationary body at each of the opposed sides by a resilient primary axis pivot; a mirror support supported by and movable with the movable body, the mirror support having a first unfettered side and a second unfettered side; a primary axis actuator comprising a fixed portion connected to the stationary body, and a movable portion connected to the movable body, the movable portion being movable relative to the fixed portion in response to an electrical potential difference between the fixed portion and the movable portion, such that the movable body rotates about the primary axis resilient pivot; a secondary axis resilient pivot positioned between the mirror support and the movable body; a secondary axis actuator, the secondary axis actuator comprising a fixed portion connected to the movable body, and a movable portion connected to the mirror support, the movable portion moving away from the fixed portion in response to an electrical potential difference between the fixed portion and the movable portion, such that the mirror support rotates about the secondary axis resilient pivot; and a mirror supported by the mirror support. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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Specification