Hinge design for enhanced optical performance for a digital micro-mirror device

• US 7,911,679 B2
• Filed: 08/06/2007
• Issued: 03/22/2011
• Est. Priority Date: 12/19/2003
• Status: Active Grant

• Current Assignee: Texas Instruments, Inc.
• Original Assignee: Texas Instruments, Inc.
• Inventors: Mangrum, Brett A., Stevenson, Clayton L., Ossenfort, John P.
• Primary Examiner(s): Mack; Ricky L
• Assistant Examiner(s): Thomas; Brandi N
• Application Number:
  US11/834,567
• Publication Number:
  US 20080030842A1
• Time in Patent Office: 1,324 Days
• Field of Search: 359/290, 359/291, 359/292, 359/298
• US Class Current: 359/291
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means
• CPC Class Codes: Y10S 359/904 Micromirror

Abstract

An apparatus for use with a digital micro-mirror 100 includes a hinge 116 disposed outwardly from a substrate 102. The hinge 116 is capable of at least partially supporting a micro-mirror 104 disposed outwardly from the hinge 116. The micro-mirror 104 is capable of being selectively transitioned between an on-state position and an off-state position. In one particular embodiment, the hinge 116 comprises a substantially flat profile for at least a portion of the hinge 116 disposed between a first hinge post 108 of the hinge 116 and a mid-point of the hinge 116. The apparatus also includes a plurality of process control voids formed within a conductive layer 120 disposed inwardly from the hinge 116. In one particular embodiment, the substantially flat profile is at least partially created from the plurality of process control voids.

Claims

1. A method of forming a micromechanical device comprising:

a substrate;

forming a hinge comprising a supported end, a supporting end, and an intermediate region between said supported end and said supporting end, said supported end supported by and spaced apart from said substrate by a first distance, said supporting end spaced apart from said substrate by a second distance, and said intermediate region spaced apart from said substrate by a third distance, said third distance selected from the group consisting of distances greater than both said first and second distance and distances less than both said first and second distance.

2. The method of claim 1, said forming a hinge comprising forming a hinge having said first distance within 30 Angstroms of said second distance.

3. The method of claim 1, said forming a hinge comprising forming a hinge having said first distance within 20 Angstroms of said second distance.

4. The method of claim 1, said forming a hinge comprising forming a hinge having a third distance within 150 Angstroms of said first distance.

5. The method of claim 1, said forming a hinge comprising forming a hinge having a third distance within 150 Angstroms of said second distance.

6. The method of claim 1, said forming a hinge comprising forming a hinge having a third distance within 150 Angstroms of said first distance and said second distance.

7. The method of claim 1, said forming a hinge comprising forming a hinge having a third distance within 250 Angstroms of said first distance.

8. The method of claim 7, said forming a hinge comprising forming a hinge having a third distance within 250 Angstroms of said second distance.

9. The method of claim 1, said forming a hinge comprising forming a hinge having a third distance within 250 Angstroms of said first distance and said second distance.

10. The method of claim 1, said forming a hinge comprising forming a hinge having a second distance greater than said first distance.

11. The method of claim 1, said forming a hinge comprising forming a hinge having a second distance less than said first distance.

12. The method of claim 1, said forming a hinge comprising forming a hinge having a second distance greater than said third distance.

13. The method of claim 1, said forming a hinge comprising forming a hinge having a third distance less than said first distance.

14. The method of claim 1, said forming a hinge comprising forming a hinge having a third distance greater than said first distance.

15. The method of claim 1, said forming a hinge comprising forming a hinge having a third distance greater than said second distance.

16. The method of claim 1, said forming a hinge comprising forming a hinge of an aluminum alloy.

17. The method of claim 1, comprising annealing said hinge.

18. The method of claim 1, comprising forming a deflectable member supported by said supporting end of said hinge.

19. The method of claim 14, comprising forming a deflectable mirror supported by said supporting end of said hinge.