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Micromirror device having a vertical hinge

  • US 7,911,680 B2
  • Filed: 02/20/2009
  • Issued: 03/22/2011
  • Est. Priority Date: 11/01/2003
  • Status: Active Grant
First Claim
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1. A mirror device, comprising:

  • a plurality of electrodes disposed on a substrate;

    a hinge connected to at least one of the electrodes and the hinge stands on said substrate extending along substantially a vertical direction from the substrate;

    said hinge supports a mirror disposed on top of said hinge along substantially a horizontal direction wherein a cross sectional area of said hinge near the electrode is less than or equal to a cross sectional area of said hinge near said mirror; and

    a length of the hinge is approximately 2 μ

    m or smaller, andthe mirror is substantially a square mirror wherein each side of said square mirror having a length approximately 10 μ

    m or smaller.

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