Method and system for measuring physical parameters with a piezoelectric bimorph cantilever in a gaseous or liquid environment

• US 7,914,203 B2
• Filed: 11/18/2009
• Issued: 03/29/2011
• Est. Priority Date: 12/15/2005
• Status: Active Grant

• Current Assignee: Universiteit Hasselt
• Original Assignee: IMEC International, Universiteit Hasselt
• Inventors: Mortet, Vincent, Petersen, Rainer
• Primary Examiner(s): Caputo; Lisa M
• Assistant Examiner(s): Jagan; Mirellys
• Application Number:
  US12/621,229
• Publication Number:
  US 20100129920A1
• Time in Patent Office: 496 Days
• Field of Search: 374/117, 73/240.6, 73/645.3, 737/04
• US Class Current: 374/117
• CPC Class Codes: G01N 2291/0255 (Bio)chemical reactions, e.g. on biosensors
• CPC Class Codes: G01N 2291/0256 Adsorption, desorption, surface mass change, e.g. on biosensors
• CPC Class Codes: G01N 2291/0427 Flexural waves, plate waves, e.g. Lamb waves, tuning fork, cantilever
• CPC Class Codes: G01N 29/022 Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices microdevices per se B81B
• CPC Class Codes: G01N 29/245 Ceramic probes, e.g. lead zirconate titanate [PZT] probes
• CPC Class Codes: Y10T 436/143333 Saccharide [e.g., DNA, etc.]

Abstract

A piezoelectric bimorph cantilever is used for determining physical parameters in a gaseous or liquid environment. The sensor works as a driven and damped oscillator. Contrary to common cantilever sensor systems, the piezoelectric film of the bimorph cantilever acts as both a sensor and an actuator. Using at least two resonance mode of the bimorph cantilever, at least two physical parameters can be measured simultaneously in a gas or a liquid. An optimized piezoelectric cantilever and a method to produce the cantilever are also described.

Claims

1. A method for measuring at least two physical parameters in an environment comprising at least one of a gas and a liquid, the method comprising:

providing a piezoelectric bimorph cantilever comprising at least a first layer, a piezoelectric layer, and two electrodes;

placing the piezoelectric bimorph cantilever in the environment;

vibrating the piezoelectric bimorph cantilever, wherein vibrating the piezoelectric bimorph cantilever comprises applying an AC voltage across the two electrodes;

determining the resonant frequencies of at least two resonance modes of the piezoelectric bimorph cantilever, wherein applying the AC voltage across the two electrodes and determining the resonant frequency of the at least two resonance modes of the piezoelectric bimorph cantilever is achieved with an impedance analyzer; and

determining at least two physical parameters of the environment, each based on a combination of resonant frequencies of the at least two resonance modes.

2. The method of claim 1, wherein placing the piezoelectric bimorph cantilever in the environment comprises mounting the piezoelectric bimorph cantilever on a support, and coupling the electrodes to at least one of an analysis tool and an electronic network.

3. The method of claim 1, wherein determining the at least two physical parameters of the environment comprises determining pressure and temperature of the environment.

4. The method of claim 1, wherein determining the at least two physical parameters of the environment comprises detecting a change in weight of the piezoelectric bimorph cantilever and determining a concentration of at least one of a chemical species and a biological species.

5. The method of claim 1, wherein providing the piezoelectric bimorph cantilever comprises fabricating the piezoelectric bimorph cantilever by a process comprising:

providing a first layer;

depositing a first electrode material on a portion of a base material;

depositing a piezoelectric material on a portion of the first layer;

depositing a second electrode material on a portion of the piezoelectric material; and

patterning the first layer and the piezoelectric material in a cantilever shape.

6. The method of claim 5, wherein the process further comprises coating the piezoelectric bimorph cantilever with a layer that is configured to bind at least one of a biological species and a chemical species.

7. The method of claim 1, wherein determining the resonant frequencies of the at least two resonance modes of the piezoelectric bimorph cantilever comprises using a frequency-selective network.

8. The method of claim 7, wherein the frequency-selective network is mounted on a support comprising the piezoelectric bimorph cantilever.

9. The method of claim 1, wherein determining the at least two physical parameters of the environment based on the at least two resonance modes comprises comparing the at least two resonance modes with calibration curves.

10. The method of claim 9, wherein comparing the at least two resonance modes with the calibration curves comprises using integrating electronics on a support comprising the piezoelectric bimorph cantilever.

11. A method for measuring at least two physical parameters in an environment comprising at least one of a gas and a liquid, the method comprising:

providing a piezoelectric bimorph cantilever comprising at least a first layer, a piezoelectric layer, and two electrodes;

placing the piezoelectric bimorph cantilever in the environment;

vibrating the piezoelectric bimorph cantilever;

determining the resonant frequencies of at least two resonance modes of the piezoelectric bimorph cantilever, wherein determining the resonant frequencies of the at least two resonance modes of the piezoelectric bimorph cantilever comprises using a frequency-selective network; and

determining at least two physical parameters of the environment, each based on a combination of resonant frequencies of the at least two resonance modes.

12. The method of claim 11, wherein the frequency-selective network is mounted on a support comprising the piezoelectric bimorph cantilever.

13. A method for measuring at least two physical parameters in an environment comprising at least one of a gas and a liquid, the method comprising:

providing a piezoelectric bimorph cantilever comprising at least a first layer, a piezoelectric layer, and two electrodes;

placing the piezoelectric bimorph cantilever in the environment;

vibrating the piezoelectric bimorph cantilever;

determining the resonant frequencies of at least two resonance modes of the piezoelectric bimorph cantilever, wherein determining the at least two physical parameters of the environment based on the at least two resonance modes comprises comparing the at least two resonance modes with calibration curves; and

determining at least two physical parameters of the environment, each based on a combination of resonant frequencies of the at least two resonance modes.

14. The method of claim 13, wherein comparing the at least two resonance modes with the calibration curves comprises using integrating electronics on a support comprising the piezoelectric bimorph cantilever.