Tape-manufacturing system having extended operational capabilities
First Claim
1. A method for coating at least one tape substrate said method comprising the steps of:
- providing at least a portion of at least one tape substrate to an enlarged deposition zone, defined by at least two electron beam (e-beam) deposition sources, the at least two e-beam deposition sources include first and second e-beam sources, the first and second e-beam sources have first and second evaporant material flux profiles that are partially overlapped such that a first waning portion of the first evaporant material flux profile is superimposed with a second waning portion of the second evaporant material flux profile to create a combined evaporant material flux substantially the same as at a center of the first evaporant material flux profile to form a substantially flat combined evaporant material flux profile;
communicating an evaporant material from the at least two e-beam deposition sources with the at least a portion of at least one tape substrate to deposit a coating thereon, the evaporant material from each of the e-beam deposition sources having substantially the same composition;
communicating an assist beam of a species to the evaporant material communicating with the at least a portion of at least one tape substrate such that the coating is biaxially textured;
providing at least another portion of at least one tape substrate to the enlarged deposition zone;
communicating the evaporant material from the at least two e-beam deposition sources with the at least another portion of at least one tape substrate to deposit a coating thereon; and
communicating an assist beam of the species to the evaporant material communicating with the at least another portion of at least one substrate such that the coating is biaxially textured.
0 Assignments
0 Petitions
Accused Products
Abstract
A tape-manufacturing system for coating at least one tape substrate such as, for example, for the manufacture of a high-temperature superconductor (HTS) conductor is disclosed. The tape-manufacturing system includes at least two electron beam (e-beam) deposition sources, at least one assist source and, optionally, a controller. Each e-beam deposition source may be in-process repairable. Each e-beam deposition source is capable of communicating an evaporant material with at least a portion of at least one tape substrate to deposit a coating thereon. The at least one assist source is capable of communicating a beam of a species to the coating. The controller communicates with the at least two e-beam deposition sources and the at least one assist source.
84 Citations
17 Claims
-
1. A method for coating at least one tape substrate said method comprising the steps of:
-
providing at least a portion of at least one tape substrate to an enlarged deposition zone, defined by at least two electron beam (e-beam) deposition sources, the at least two e-beam deposition sources include first and second e-beam sources, the first and second e-beam sources have first and second evaporant material flux profiles that are partially overlapped such that a first waning portion of the first evaporant material flux profile is superimposed with a second waning portion of the second evaporant material flux profile to create a combined evaporant material flux substantially the same as at a center of the first evaporant material flux profile to form a substantially flat combined evaporant material flux profile; communicating an evaporant material from the at least two e-beam deposition sources with the at least a portion of at least one tape substrate to deposit a coating thereon, the evaporant material from each of the e-beam deposition sources having substantially the same composition; communicating an assist beam of a species to the evaporant material communicating with the at least a portion of at least one tape substrate such that the coating is biaxially textured; providing at least another portion of at least one tape substrate to the enlarged deposition zone; communicating the evaporant material from the at least two e-beam deposition sources with the at least another portion of at least one tape substrate to deposit a coating thereon; and communicating an assist beam of the species to the evaporant material communicating with the at least another portion of at least one substrate such that the coating is biaxially textured. - View Dependent Claims (2)
-
-
3. A method of forming a high temperature superconducting (HTS) conductor structure, comprising the steps of:
-
translating a tape substrate through an evacuated chamber of a manufacturing system, the evacuated chamber having (i) a plurality of e-beam sources arranged serially to create an elongated coating deposition zone along a length of the tape substrate, the plurality of e-beam sources including first and second e-beam sources, the first and second e-beam sources having first and second evaporant material flux profiles that are partially overlapped such that a first waning portion of the first evaporant material flux profile is superimposed with a second waning portion of the second evaporant material flux profile to create a combined evaporant material flux substantially the same as at a center of the first evaporant material flux profile, the elongated coating deposition zone having an increased area compared to a deposition zone defined by a single e-beam source, and (ii) at least one material source; operating the plurality of e-beam sources to form evaporant material from the at least one material source; irradiating the evaporant material with a species from an assist source such that the evaporant material deposits on the tape substrate to form a biaxially textured coating on the tape substrate; and repairing the first e-beam source while maintaining vacuum in the evacuated chamber. - View Dependent Claims (4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
-
-
17. A method of forming a high temperature superconducting (HTS) conductor structure, comprising the steps of:
-
translating a tape substrate through an evacuated chamber of a manufacturing system, the evacuated chamber having (i) a plurality of e-beam sources arranged serially to create an elongated coating deposition zone along a length of the tape substrate, the plurality of e-beam sources including first and second e-beam sources and the first e-beam source having a line of sight to the substrate as the substrate translates through the evacuated chamber, the first and second e-beam sources having first and second evaporant material flux profiles that are partially overlapped such that a first waning portion of the first evaporant material flux profile is superimposed with a second waning portion of the second evaporant material flux profile to create a combined evaporant material flux substantially the same as at a center of the first evaporant material flux profile, the elongated coating deposition zone having an increased area compared to a deposition zone defined by a single e-beam source, and (ii) at least one material source; operating the plurality of e-beam sources to form evaporant material from the at least one material source; irradiating the evaporant material with a species from the an assist source such that the evaporant material deposits on the tape substrate to form a biaxially textured coating on the tape substrate; monitoring wear of the first e-beam source; blocking the line of sight of the first e-beam source to isolate the first e-beam source from the substrate; and repairing the first e-beam source while maintaining vacuum in the evacuated chamber.
-
Specification