Methods of making electromechanical three-trace junction devices

• US 7,915,066 B2
• Filed: 09/02/2008
• Issued: 03/29/2011
• Est. Priority Date: 12/28/2001
• Status: Expired due to Term

• Current Assignee: Nantero Incorporated
• Original Assignee: Nantero Incorporated
• Inventors: Brock, Darren K., Segal, Brent M., Rueckes, Thomas
• Primary Examiner(s): HOANG, QUOC DINH
• Application Number:
  US12/202,737
• Publication Number:
  US 20090053846A1
• Time in Patent Office: 938 Days
• Field of Search: 438/52, 438/53, 438/99, 257/E21.038
• US Class Current: 438/52
• CPC Class Codes: B81C 1/00142 Bridges deformable micromirrors G02B26/0841
• CPC Class Codes: B81C 2201/019 Bonding or gluing multiple substrate layers
• CPC Class Codes: B82Y 10/00 Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
• CPC Class Codes: G11C 13/025 using fullerenes, e.g. C60, or nanotubes, e.g. carbon or silicon nanotubes
• CPC Class Codes: G11C 2213/16 Memory cell being a nanotube, e.g. suspended nanotube
• CPC Class Codes: G11C 2213/81 Array wherein the array conductors, e.g. word lines, bit lines, are made of nanowires
• CPC Class Codes: G11C 23/00 Digital stores characterised by movement of mechanical parts to effect storage, e.g. using balls; Storage elements therefor
• CPC Class Codes: H01H 1/0094 Switches making use of nanoelectromechanical systems [NEMS]
• CPC Class Codes: H01L 21/76838 characterised by the formation and the after-treatment of the conductors etching for patterning the conductors H01L21/3213
• CPC Class Codes: Y10S 977/734 Fullerenes, i.e. graphene-based structures, such as nanohorns, nanococoons, nanoscrolls or fullerene-like structures, e.g. WS2 or MoS2 chalcogenide nanotubes, planar C3N4, etc.

Abstract

Methods of producing an electromechanical circuit element are described. A lower structure having lower support structures and a lower electrically conductive element is provided. A nanotube ribbon (or other electromechanically responsive element) is formed on an upper surface of the lower structure so as to contact the lower support structures. An upper structure is provided over the nanotube ribbon. The upper structure includes upper support structures and an upper electrically conductive element. In some arrangements, the upper and lower electrically conductive elements are in vertical alignment, but in some arrangements they are not.

Claims

1. A method of producing a circuit element, the method comprising:

providing a first structure having first support structures and a first electrically conductive element;

providing a layer of nanoscopic conductive elements on a surface of the first structure so as to contact the first support structures;

patterning the layer;

removing some of the nanoscopic elements in accordance with a defined pattern; and

providing a second structure having second support structures and a second electrically conductive element, wherein the second support structures contact the nanoscopic conductive elements and pin the nanoscopic conductive elements to the first support structure;

wherein the defined pattern defines an orientation of the nanoscopic elements;

wherein the first conductive element has a defined orientation that is substantially perpendicular to the orientation of the nanoscopic elements.

2. The method of claim 1, wherein the nanoscopic conductive elements is a nanowire.

3. The method of claim 1, wherein the nanoscopic conductive elements is a nanotube.

4. The method of claim 1, wherein the nanoscopic conductive elements is substantially a monolayer of nanotubes.

5. The method of claim 1, wherein the second conductive element has a defined orientation that is substantially parallel to the defined orientation of the first conductive element.

6. The method of claim 5, wherein the first and second conductive elements are shifted relative to one another in a direction perpendicular to their substantially defined orientation.

7. The method of claim 1, wherein at least one of the first and second structures includes a region having sacrificial material in contact with the nanoscopic conductive elements, and wherein the method includes the removal of the material.

8. The method of claim 7, wherein the sacrificial material is removed by an etchant, and further wherein the etchant diffuses through the nanoscopic conductive elements.

9. The method of claim 1, wherein the nanoscopic conductive elements comprise a plurality of unaligned nanotubes.

10. The method of claim 9, further comprising functionalizing the nanotubes with planar conjugated hydrocarbons.

11. The method of claim 10, wherein the hydrocarbons are pyrenes.

12. A method of producing a circuit element, the method comprising:

providing a first structure;

providing a layer of nanoscopic conductive elements on a surface of the first structure so as to contact the first support structures;

patterning the layer;

removing some of the nanoscopic elements in accordance with a defined pattern; and

providing a second structure in contact with the nanoscopic conductive elements, wherein the second structure pins the nanoscopic conductive elements to the first structure;

wherein at least one of the first and second structures includes a region having sacrificial material in contact with the nanoscopic conductive elements, and wherein the method includes the removal of the material.

13. The method of claim 12, wherein the nanoscopic conductive elements is a nanowire.

14. The method of claim 12, wherein the nanoscopic conductive elements is a nanotube.

15. The method of claim 12, wherein the nanoscopic conductive elements is substantially a monolayer of nanotubes.

16. The method of claim 12, wherein the sacrificial material is removed by an etchant, and further wherein the etchant diffuses through the nanoscopic conductive elements.

17. The method of claim 12, wherein the nanoscopic conductive elements comprise a plurality of unaligned nanotubes.

18. The method of claim 17, further comprising functionalizing the nanotubes with planar conjugated hydrocarbons.

19. The method of claim 18, wherein the hydrocarbons are pyrenes.