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Measurement apparatus and method

  • US 7,916,310 B2
  • Filed: 08/26/2010
  • Issued: 03/29/2011
  • Est. Priority Date: 10/03/2006
  • Status: Active Grant
First Claim
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1. A measurement apparatus comprising:

  • a radiation output configured to provide a measurement beam of radiation such that an individually controllable element of an array of individually controllable elements capable of modulating a beam of radiation, is illuminated by the measurement beam and redirects the measurement beam; and

    a detector arranged to receive the redirected measurement beam and determine tilt of the individually controllable element from the redirected measurement beam.

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