Method and apparatus for providing a light absorbing mask in an interferometric modulator display
First Claim
Patent Images
1. An electromechanical system comprising:
- a transparent substrate; and
a plurality of interferometric modulators comprising;
an optical stack coupled to the transparent substrate, the optical stack comprising;
a first light absorbing layer; and
a conducting layer comprising a partially reflective layer, said conducting layer separate from the first light absorbing layer;
a reflective layer over the optical stack; and
one or more posts to support the reflective layer, each of the one or more posts including a second light absorbing layer integrated in the post,wherein the second light absorbing layer is separate from the first light absorbing layer, andwherein a portion of the second light absorbing layer within a given post extends over a portion of the first light absorbing layer within the optical stack such that the portion of the second light absorbing layer overlaps the portion of the first light absorbing layer.
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Abstract
A microelectromechanical system (MEMS) is provided. In one embodiment, the MEMS includes a transparent substrate, and a plurality of interferometric modulators. The plurality of interferometric modulators includes an optical stack coupled to the transparent substrate, in which the optical stack includes a first light absorbing area. The plurality of interferometric modulators further includes a reflective layer over the optical stack, and one or more posts to support the reflective layer. Each of the one or more posts includes a second light absorbing area integrated in the post.
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Citations
25 Claims
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1. An electromechanical system comprising:
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a transparent substrate; and a plurality of interferometric modulators comprising; an optical stack coupled to the transparent substrate, the optical stack comprising; a first light absorbing layer; and a conducting layer comprising a partially reflective layer, said conducting layer separate from the first light absorbing layer; a reflective layer over the optical stack; and one or more posts to support the reflective layer, each of the one or more posts including a second light absorbing layer integrated in the post, wherein the second light absorbing layer is separate from the first light absorbing layer, and wherein a portion of the second light absorbing layer within a given post extends over a portion of the first light absorbing layer within the optical stack such that the portion of the second light absorbing layer overlaps the portion of the first light absorbing layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. An electromechanical system comprising:
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a means for transmitting light; and means for modulating light, comprising; first means for absorbing light coupled to the transmitting means; a means for conducting electricity, said electricity conducting means comprising a means for partially reflecting light, said electricity conducting means separate from the first light absorbing means; means for reflecting light, the reflecting means over the first absorbing means; and means for supporting the reflecting means, said supporting means comprising a second means for absorbing light, wherein the second absorbing means is integrated in the supporting means, wherein the second absorbing means is separate from the first absorbing means, and wherein a portion of the second light absorbing means within the supporting means extends over a portion of the first light absorbing means within the optical stack means such that a portion of the second light absorbing means overlaps a portion of the first light absorbing means. - View Dependent Claims (14, 15, 16, 17, 18, 19, 20)
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21. A method for forming an electromechanical system, the method comprising:
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providing a transparent substrate; forming a first light absorbing layer on the transparent substrate; forming a conducting layer including a partially reflective layer on the transparent substrate, the conducting layer separate from the first light absorbing layer; forming a reflective layer over the conducting layer; and forming one or more posts to support the reflective layer, the one or more posts being formed over the transparent substrate and over portions of the conducting layer that do not overlap with the first light absorbing layer, wherein forming one or more posts includes integrating a second light absorbing layer into the one or more posts, wherein the second light absorbing layer is separate from the first light absorbing layer, and wherein a portion of the second light absorbing layer extends over a portion of the first light absorbing layer such that a portion of the second light absorbing layer overlaps a portion of the first light absorbing layer. - View Dependent Claims (22, 23)
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24. A method of modulating light, the method comprising:
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providing an electromechanical system comprising; a transparent substrate; and a plurality of modulators comprising an optical stack, a reflective layer over the optical stack, and one or more posts supporting the reflective layer over the optical stack, wherein the optical stack comprises; a first light absorbing layer; a conducting layer including a partially reflective layer, said conducting layer separate from the partially reflective layer; and the one or more posts comprises a second light absorbing layer integrated in the one or more posts, wherein the second light absorbing layer is separate from the first light absorbing layer; transmitting light through the transparent substrate and the optical stack, the light irradiating the reflective layer; and moving the reflective layer relative to the optical stack.
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25. An electromechanical system comprising:
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a transparent substrate; and a plurality of interferometric modulators comprising; an optical stack coupled to the transparent substrate, the optical stack including a first light absorbing layer; a reflective layer over the optical stack; and one or more posts to support the reflective layer, each of the one or more posts including a second light absorbing layer integrated in the post, wherein the second light absorbing layer is separated from the first light absorbing layer by an air gap, and wherein a portion of the second light absorbing layer within a given post extends over a portion of the first light absorbing layer within the optical stack such that the portion of the second light absorbing layer overlaps the portion of the first light absorbing layer.
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Specification