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Photoformed silicone sensor membrane

  • US 7,918,978 B2
  • Filed: 07/12/2006
  • Issued: 04/05/2011
  • Est. Priority Date: 07/14/2005
  • Status: Active Grant
First Claim
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1. A sensing device, comprising:

  • a sensing surface;

    a matrix overlaying the sensing surface; and

    a photoformed membrane overlaying at least a portion of the matrix,wherein the photoformed membrane comprises a directly photoformed organosiloxane polymer comprising a silsesquioxane polymer that is substantially permeable to gaseous molecules and substantially impermeable to non-gaseous molecules and ions.

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