Electromechanical device with optical function separated from mechanical and electrical function
First Claim
Patent Images
1. An electromechanical device comprising:
- a substrate;
a movable element over the substrate, the movable element comprising an electrically conductive deformable layer and a reflective element mechanically coupled to the deformable layer, the reflective element including a reflective surface, the reflective surface spaced from the deformable layer along a direction generally parallel to the reflective surface; and
an actuation electrode under at least a portion of the deformable layer and disposed laterally from the reflective surface, wherein the movable element is responsive to a voltage difference applied between the actuation electrode and the deformable layer by moving in a direction towards or away from the substrate.
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Abstract
In certain embodiments, a microelectromechanical (MEMS) device comprises a substrate having a top surface, a movable element over the substrate, and an actuation electrode disposed laterally from the reflective surface. The movable element comprises a deformable layer and a reflective element mechanically coupled to the deformable layer. The reflective element includes a reflective surface. The movable element is responsive to a voltage difference applied between the actuation electrode and the movable element by moving in a direction generally perpendicular to the top surface of the substrate.
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Citations
40 Claims
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1. An electromechanical device comprising:
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a substrate; a movable element over the substrate, the movable element comprising an electrically conductive deformable layer and a reflective element mechanically coupled to the deformable layer, the reflective element including a reflective surface, the reflective surface spaced from the deformable layer along a direction generally parallel to the reflective surface; and an actuation electrode under at least a portion of the deformable layer and disposed laterally from the reflective surface, wherein the movable element is responsive to a voltage difference applied between the actuation electrode and the deformable layer by moving in a direction towards or away from the substrate. - View Dependent Claims (2, 3)
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4. An electromechanical device comprising:
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a movable element comprising an electrically conductive deformable layer and a reflective element mechanically coupled to the deformable layer, the reflective element including a reflective surface, the reflective surface spaced from the deformable layer along a direction generally parallel to the reflective surface; and an actuation electrode under at least a portion of the deformable layer and disposed laterally from the reflective surface, wherein the movable element is responsive to a voltage difference applied between the actuation electrode and the deformable layer by moving from a first position to a second position. - View Dependent Claims (5, 6)
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7. An electromechanical device comprising:
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a movable element comprising an electrically conductive deformable layer and a reflective element mechanically coupled to the deformable layer, the reflective element including a reflective surface; and an actuation electrode under at least a portion of the deformable layer and disposed laterally from the reflective surface, wherein the movable element is responsive to a voltage difference applied between the actuation electrode and the deformable layer by moving from a first position to a second position. - View Dependent Claims (8, 9, 10, 11, 12, 13, 14)
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15. An electromechanical device comprising:
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a movable element comprising an electrically conductive deformable layer and a reflective element mechanically coupled to the deformable layer, the reflective element including a reflective surface, wherein the movable element further comprises at least one connecting element, the at least one connecting element mechanically coupling the reflective element to the deformable layer, wherein the at least one connecting element comprises at least one protrusion extending from the reflective element; and an actuation electrode under at least a portion of the deformable layer and disposed laterally from the reflective surface, wherein the movable element is responsive to a voltage difference applied between the actuation electrode and the deformable layer by moving from a first position to a second position. - View Dependent Claims (16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27)
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28. An electromechanical device comprising:
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a movable element comprising an electrically conductive deformable layer and a reflective element mechanically coupled to the deformable layer, the reflective element including a reflective surface; an actuation electrode under at least a portion of the deformable layer and disposed laterally from the reflective surface, wherein the movable element is responsive to a voltage difference applied between the actuation electrode and the deformable layer by moving from a first position to a second position; and a second actuation electrode over the movable element, wherein the movable element is further responsive to a voltage difference applied between the second actuation electrode and the movable element by moving from the first position to a third position. - View Dependent Claims (29, 30, 31, 32, 33, 34, 35)
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36. An electromechanical device comprising:
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a movable element comprising an electrically conductive deformable layer and a reflective element mechanically coupled to the deformable layer, the reflective element including a reflective surface; and an actuation electrode under at least a portion of the deformable layer and disposed laterally from the reflective surface, wherein the movable element is responsive to a voltage difference applied between the actuation electrode and the deformable layer by moving from a first position to a second position, wherein the reflective element is configured to reflect a first color in the first position and to reflect a second color in the second position. - View Dependent Claims (37, 38, 39, 40)
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Specification