Tunable optical active elements

• US 7,920,330 B2
• Filed: 02/06/2007
• Issued: 04/05/2011
• Est. Priority Date: 02/07/2006
• Status: Expired due to Fees

• Current Assignee: ETH Transfer (ETH Zurich), ETH Zurich
• Original Assignee: ETH Transfer (ETH Zurich), ETH Zurich
• Inventors: Aschwanden, Manuel, Beck, Markus Daniel, Belyaev, Yury, Stemmer, Andreas
• Primary Examiner(s): Thompson; Timothy J
• Application Number:
  US12/223,742
• Publication Number:
  US 20090310209A1
• Time in Patent Office: 1,519 Days
• Field of Search: 359/665, 359/666, 359/667, 359/642
• US Class Current: 359/665
• CPC Class Codes: G02B 26/0808 by means of one or more diffracting elements
• CPC Class Codes: G02B 5/1828 having means for producing variable diffraction controlling the direction of light by means of one or more diffracting elements G02B26/0808; acousto-optical elements G02F1/11, G02F1/33; electro- or magneto-optical diffraction G02F1/292, G02F1/2955
• CPC Class Codes: G02B 5/1847 Manufacturing methods

Abstract

The invention is directed to different optical active elements (1, 20, 22) such as tunable diffraction gratings and tunable phase shifters having in general a similar setup. The optical active elements (1, 20, 22) comprise an intermediate layer (4) made out of a deformable material which is mechanically interconnected to a driving means. The driving means comprises a first and a second driving plate (2, 3) arranged in general opposite to each other on opposite sides of and at least partially covering the intermediate layer (4) such that a local compression of the intermediate layer (4) by the driving plates (2, 3) causes a local reduction of the thickness in a first direction. This reduction in a first direction causes a secondary deformation of the intermediate layer in a second direction which results in a change of the optical behavior of the optical active element.

Claims

1. An optical active element comprising:

an intermediate layer made out of a deformable material and mechanically interconnected to a first and a second driving plate arranged in general opposite to each other on opposite sides of and partially covering the intermediate layer such that a local compression of the intermediate layer by the driving plates causes a local reduction of the thickness of the intermediate layer in a first direction and at least one thereto by the poisson'"'"'s ratio of the material of the intermediate layer related secondary deformation of the intermediate layer in a second direction whereby the secondary deformation causes a change in the optical behavior of the optical active area,

wherein the intermediate layer is attached to a holding means in a prestretched manner such that the intermediate layer does not deform out of plane during operation.

2. The optical active element according to claim 1 wherein the first and the second driving plates are a first and a second electrode arranged such that when a voltage is applied between the first and the second electrode, the first and the second electrode attract each other due to coulomb forces.

3. The optical active element according to claim 2, wherein at least one of the electrodes consists of carbon black.

4. The optical active element according to claim 1 wherein the holding means has one of a circular and a square opening in which the intermediate layer is arranged.

5. The optical active element according to claim 2 wherein the electrodes are arranged laterally to the optical active area.

6. The optical active element according to claim 1 wherein the intermediate layer has a thickness in the range of 100 nm to 150 μ

m.

7. The optical active element according to claim 1 wherein the intermediate layer has a diameter in the range of 10 μ

m to 500 mm.

8. The optical active element according to claim 1 wherein an area of the intermediate layer not covered by the driving plates has an adjustable diameter which is related to the compression of the intermediate layer in the first direction by the poisson'"'"'s ratio of the material.

9. The optical active element according to claim 8 wherein the area with the adjustable diameter comprises a diffraction grating with an adjustable grating period.

10. The optical active element according to claim 9 wherein the diffraction grating is a Fresnel-Lens.

11. The optical active element according to claim 9 wherein the diffraction grating comprises one of an injection molded, spin-coated, and stamped material.

12. The optical active element according to claim 1 wherein an optical active area of the intermediate layer not covered by the driving plates is transparent and has an adjustable thickness which is related to the compression of the intermediate layer in the first direction by the poisson'"'"'s ratio of the material.

13. The optical active element according to claim 12 wherein the optical active area acts as phase shifting element.

14. The optical active element according to claim 12 wherein the optical active area acts as a lens having a variable focus.

18. The optical active element according to claim 9 wherein the diffraction grating is implemented in the surface of the intermediate layer or attached to the surface of the intermediate layer as a separate element.

19. A method for making of an optical element according to claim 1 comprising the following steps:

a) stretching the intermediate layer by 200% to 300% resulting in a prestretched intermediate layer;

b) attaching the prestretched intermediate layer to a holding means; and

c) applying on each side of the intermediate layer an electrode at least partially covering the intermediate layer.

20. The method for making of the optical element according to claim 19 further comprising:

applying a grating to the intermediate layer.

21. The method for making the optical element according to claim 20, wherein the grating is made by one of spin coating, injection molding, and thermal forming.

22. The method according to claim 19 wherein the electrode consists of carbon black powder which is one of stamped, sprayed, coated, and printed.

15. An optical active element comprising:

an intermediate layer made out of a deformable material and mechanically interconnected to a first and a second driving plate arranged in general opposite to each other on opposite sides of and partially covering the intermediate layer such that a local compression of the intermediate layer by the driving plates causes a local reduction of the thickness of the intermediate layer in a first direction and at least one thereto by the poisson'"'"'s ratio of the material of the intermediate layer related secondary deformation of the intermediate layer in a second direction whereby the secondary deformation causes a change in the optical behavior of the optical active area,

wherein an optical active area of the intermediate layer not covered by the driving plates is transparent and has an adjustable thickness which is related to the compression of the intermediate layer in the first direction by the poisson'"'"'s ratio of the material

wherein the optical active area acts as a lens having a variable focus, and

wherein the lens comprises a lens-shaped chamber (16) delimited by two foil-like areas (14).

16. The optical active element according to claim 15 wherein the lens-shaped chamber is filled with a material having a higher refractive index than the surrounding environment.

17. The optical active element according to claim 15 wherein the lens-shaped chamber is filled with a liquid.