Method of using an atomic force microscope and microscope

• US 7,921,466 B2
• Filed: 02/21/2006
• Issued: 04/05/2011
• Est. Priority Date: 06/24/2005
• Status: Active Grant

• Current Assignee: Consejo Superior de Investigaciones Científicas,
• Original Assignee: Consejo Superior de Investigaciones Científicas,
• Inventors: Rodriguez Frutos, Tomás Raul, Garcia Garcia, Ricardo
• Primary Examiner(s): Souw; Bernard E
• Assistant Examiner(s): Purinton; Brooke
• Application Number:
  US11/922,844
• Publication Number:
  US 20090229019A1
• Time in Patent Office: 1,869 Days
• Field of Search: 850/33, 850/38, 850/5, 850/1, 850/3, 850/4, 250306-308
• US Class Current: 850/33
• CPC Class Codes: G01Q 30/04 Display or data processing devices
• CPC Class Codes: G01Q 60/34 Tapping mode

Abstract

The invention relates to a method of using an atomic force microscope and to a microscope. The inventive method comprises the following steps consisting in at least performing bimodal excitation of a microlever (M) which is disposed on a sample and analysing at least: the variation in the oscillation amplitude (A_i) of an output signal (A_i cos(ω_it−φ_i)) that is representative of the response from the microlever (M) to the excitation of one of the natural vibration modes thereof, in order to obtain topographic information in relation to the sample; and to the variation in the phase (φ_j) of an output signal (A_j cos(ω_jt−φ_j)) that is representative of the response from the microlever (M) to the excitation of another natural vibration mode thereof, in order to obtain compositional information in relation to the sample. The inventive microscope is adapted to be used with the aforementioned method.

Claims

1. A method of use of an atomic force microscope by means of amplitude modulation, of the type that comprises exciting a natural vibration mode of a microlever (M) of said microscope, arranged on a sample to examine, and analyzing at least the variation in amplitude (A_i) of oscillation of an output signal (A_i cos(ω

_it−

φ

_i)), where t is the time and ω

_iis the frequency of the microlever (M), representing the response of the microlever (M) to that excitation, in order to obtain topographical information on that sample, wherein said method further comprises an additional excitation of at least one other natural vibration mode of the microlever (M) such that at least two of said excitations of said natural vibration modes of the microlever (M) are carried out simultaneously, and analyzing at least the variation in phase (φ

_i) of an output signal (A_i cos(ω

_it−

φ

_i)) representing the response of the microlever (M) to said additional excitation, in order to obtain compositional information on said sample is carried out by means of an excitation signal (F_icosω

_it) of higher frequency than the frequency of an excitation signal (F_icosω

_it) used for obtaining said topographical information.

2. The method according to claim 1, wherein said natural modes correspond to the first two natural modes of the microlever (M).

3. The method according to claim 1, wherein said natural modes correspond to any pair of natural vibration modes of the microlever (M), being consecutive or not consecutive.

4. The method according to claim 1, further comprising carrying out at least a third excitation consisting of exciting another natural vibration mode of the microlever (M) and analyzing the variation in amplitude and/or phase of an output signal representing the response of the microlever (M) to the third excitation in order to obtain topographical and/or compositional information on said sample.

5. The method according to claim 1, further comprising carrying out said at least two excitations of said natural vibration modes of the microlever (M) by means of a single composite excitation signal (F_i cos ω

_it+F_j cos ω

_jt) composed of the sum of said two excitation signals (F_i cos ω

_jt, F_j cos ω

_jt).

6. The method according to claim 5, further comprising decomposing an output signal (A_i cos(ω

_it−

Φ

_i)+A_j cos(ω

_jt−

Φ

_j)) representing the response of the microlever (M) to said excitation by means of said composite excitation signal (F_i cos ω

_it+F_j cosω

_jt), separating the parts of the composite excitation signal corresponding to the response to each of the at least two excitations, which are then subjected to at least the analysis of variation in their amplitude and/or phase.

7. An atomic force microscope of the type that comprises at least:

a microlever (M) to be arranged on a sample,

a scanning unit associated with the microlever (M) and adapted for performing a scan with the microlever (M) on the sample or part thereof,

an excitation unit adapted for exciting said microlever (M) with an excitation signal (F_i cos ω

_it) of frequency substantially equal to that of a natural vibration mode of said microlever (M), said excitation signal (F_i cos ω

_it) representing an excitation force,

a force detection unit associated with the excitation unit for at least detecting the forces applied to and/or generated in the microlever (M),

a detection unit adapted for detecting at least one output signal (A_i cos(ω

_it−

(Φ

_i)) representing the response of the microlever M to the excitation signal, in order to monitor variations in the amplitude (A_i) of oscillation of the output signal (A_i cos(ω

_it−

Φ

_i)) when performing the scan in order to obtain topographical information on the sample,

an image conversion and processing unit adapted for at least transforming said variations in the amplitude (A_i) of oscillation of the output signal (A_i cos(ω

_it−

Φ

_i)) into a topographical representation of the sample, and

a control unit in communication with the rest of the units of the microscope for at least controlling their functioning,

wherein the excitation unit or an additional excitation unit is adapted for additionally and simultaneously exciting the microlever (M) with another excitation signal (F_j cos ω

_jt) of frequency substantially equal to that of another natural mode of vibration of said microlever (M), this excitation representing another excitation force, and wherein the excitation unit or the additional excitation unit is adapted for detecting an additional output signal (A_ji cos(ω

_jit−

Φ

_ji)) representing the response of the microlever (M) to the additional excitation, in order to monitor variation in the phase (Φ

_jiof the additional output signal (A_ji cos(ω

_jit−

Φ

_ji)) when performing that scan in order to obtain compositional information on the sample.

8. The microscope according to claim 7, wherein said excitation unit is adapted for exciting said two natural modes of vibration of the microlever (M) by means of a single composite excitation signal (F_i cos ω

_it+F_j cosω

_jt) composed of the sum of those two excitation signals (F_i cos ω

_it, F_jcosω

_jt) of frequencies substantially equal to those of the two natural vibration modes of the microlever (M).

9. The microscope according to claim 8, wherein said detection unit is adapted for detecting an output signal (A_i cos(ω

_it−

Φ

_i)+Ajcos(Φ

_j)) representing the response of the microlever (M) to the excitation by means of the said composite excitation signal (F_i cos ω

_it+F_j cos ω

_jt).

10. The microscope according to claim 9, wherein said detection unit is adapted for decomposing into four channels the information contained in the output signal (A_i cos(ω

_it−

Φ

_i)+A_j cos(ω

_jt−

Φ

_j)) representing the response of the microlever (M) to the excitation by means of said composite excitation signal (F_i cos ω

_it+F_j cos ω

_jt), said four channels including two channels with information referring to the amplitude (A_i, A_j) of oscillation of the output signal (A_i cos(ω

_it Φ

_i)+A_j cos(ω

_jt−

Φ

_j)) for those two excitation frequencies and two channels referring to the phase (Φ

_i, Φ

_j) of the output signal (A_i cos(ω

_it−

Φ

_i)+A_j cos(ω

_jt−

Φ

_j)) for those two excitation frequencies.

11. The microscope according to claim 10, wherein said detection unit is adapted for sending said information (A_i, A_j, Φ

_i, Φ

_j) contained in said four channels to said control unit.

12. The microscope according to claim 7, wherein said additional excitation unit and said additional detection unit are in charge of respectively carrying out the additional excitation and detection of said additional output signal (A_j cos(ω

_jt−

Φ

_j)) and said monitoring of the variation of its phase (Φ

_j) and both units form part of a bimodal control module included in said microscope or external thereto, but in both cases connectable to at least said control unit for the microscope.

13. The microscope according to claim 12, wherein:

said additional excitation unit is adapted for;

receiving said excitation signal (F_i cos ω

_it) from said control unit for the microscope, or generating said excitation signal,

generating at least said additional excitation signal (F_j cos ω

_jt), and

summing the two excitation signals in order to generate a composite excitation signal (F_i cos ω

_it+F_j cos ω

_jt) and excite the microlever (M) with the composite signal (F_icos ω

_it+F_j cos ω

_jt), and

wherein said additional excitation unit is adapted for detecting an output signal (A_i cos(ω

_it−

Φ

_i)+A_j cos(ω

_jt−

Φ

_j)) representing the response of the microlever (M) to said excitation by means of said composite excitation signal (F_i cos ω

_it+F_j cos ω

_jt).

14. The microscope according to claim 13, wherein said additional detection unit is adapted for:

decomposing into four channels the information contained in the output signal (A_i cos(ω

_it−

Φ

_i)+A_j cos(ω

_jt−

Φ

_j)) representing the response of the microlever (M) to said excitation signal by means of said composite excitation signal (F_i cos ω

_it+F_j cos ω

_jt);

said four channels including two channels with information referring to the amplitude (A_i, A_j) of oscillation of said output signal (A_i cos(ω

_it−

Φ

_i)+A_j cos(ω

_jt−

Φ

_j)) for said two excitation frequencies and two channels referring to the phase (Φ

_i, Φ

_j) of said output signal (A_i cos(ω

_it−

Φ

_i) +A_j cos(ω

_jt−

Φ

_j)) for said two excitation frequencies, and for

sending the information (A_i, A_j, Φ

_i,Φ

_j) contained in said four channels to said control unit of the microscope.