Ultrathin nanoscale membranes, methods of making, and uses thereof

• US 7,922,795 B2
• Filed: 05/01/2006
• Issued: 04/12/2011
• Est. Priority Date: 04/29/2005
• Status: Active Grant

• Current Assignee: University of Rochester
• Original Assignee: University of Rochester
• Inventors: Fauchet, Philippe M., Striemer, Christopher C.
• Primary Examiner(s): Greene; Jason M
• Assistant Examiner(s): Bui; Dung
• Application Number:
  US11/415,014
• Publication Number:
  US 20060243655A1
• Time in Patent Office: 1,807 Days
• Field of Search: 95 54- 56, 96 4- 14, 210/500.21, 210/500.25, 210/500.27, 210/640
• US Class Current: 96/4
• CPC Class Codes: B01D 2325/08 Patterned membranes
• CPC Class Codes: B01D 67/0062 by micromachining techniques, e.g. using masking and etching steps, photolithography
• CPC Class Codes: B01D 67/0072 by deposition from the gaseous phase, e.g. sputtering, CVD, PVD
• CPC Class Codes: B01D 69/02 characterised by their properties
• CPC Class Codes: B01D 71/02 Inorganic material
• CPC Class Codes: B01D 71/0213 Silicon
• CPC Class Codes: B01D 71/0215 Silicon carbide; Silicon nitride; Silicon oxycarbide
• CPC Class Codes: B01D 71/022 Metals
• CPC Class Codes: B01D 71/0221 Group 4 or 5 metals
• CPC Class Codes: B01D 71/02231 Palladium
• CPC Class Codes: B01D 71/024 Oxides
• CPC Class Codes: B01D 71/027 Silicium oxide
• CPC Class Codes: G03F 7/0015 Production of aperture devices, microporous systems or stamps
• CPC Class Codes: H01J 2237/20 Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
• CPC Class Codes: H01M 2250/00 Fuel cells for particular applications; Specific features of fuel cell system
• CPC Class Codes: H01M 4/94 Non-porous diffusion electrodes, e.g. palladium membranes, ion exchange membranes
• CPC Class Codes: Y02E 60/50 Fuel cells

Abstract

A nanoscale membrane exposed on opposite sides thereof and having an average thickness of less than about 100 nm, and a lateral length to thickness aspect ratio that is more than 10,000 to 1 is disclosed. Also disclosed are methods of making such membranes, and use thereof in a number of devices including fuel cells, sensor devices, electrospray devices, and supports for examining a sample under electron microscopy.

Claims

1. A nanoscale membrane exposed on opposite sides thereof and having an average thickness of less than about 100 nm, a lateral length to thickness aspect ratio that is more than 10,000 to 1, a surface roughness of less than about 1 nm, and wherein the membrane is formed of a semiconductor material selected from the group of silicon, germanium, silicon or germanium alloys, p-doped silicon or germanium, and n-doped silicon or germanium.

2. The nanoscale membrane according to claim 1 wherein the semiconductor material is n-doped or p-doped silicon.

3. The nanoscale membrane according to claim 1 wherein the semiconductor material is in either an amorphous form or a crystalline form.

4. The nanoscale membrane according to claim 1 wherein the membrane is between about 50 and about 100 nm thick.

5. The nanoscale membrane according to claim 1 wherein the membrane is between about 10 and about 50 nm thick.

6. The nanoscale membrane according to claim 1 wherein the membrane is characterized by a surface area up to 10 square millimeters.

7. The nanoscale membrane according to claim 1 wherein the membrane is substantially planar.

8. A structure comprising:

a support having at least one passage extending between opposite surfaces of the support; and

at least one nanoscale membrane according to claim 1 bound at its outer edges to the support, wherein each of the at least one nanoscale membranes confronts a passage.

9. The nanoscale membrane according to claim 1 wherein the membrane comprises a surface roughness of less than about 0.5 nm.

10. The nanoscale membrane according to claim 1 wherein the membrane is less than about 10 nm thick.

11. The nanoscale membrane according to claim 10 wherein the membrane is between about 2 and about 8 nm thick.

12. The nanoscale membrane according to claim 1 wherein the membrane is characterized by an aspect ratio that is more than 50,000 to 1.

13. The nanoscale membrane according to claim 12 wherein the membrane is characterized by an aspect ratio that is more than about 100,000:

1.

14. A sensor comprising a membrane according to claim 1.

15. The sensor according to claim 14, wherein the sensor is a pressure sensor, a piezoelectric, or piezoresistive sensor.

16. The nanoscale membrane according to claim 1 wherein the membrane is non-planar.

17. The nanoscale membrane according to claim 16 wherein the membrane comprises a relief pattern formed therein.

18. A method of forming shaped nanoscale products, said method comprising:

providing a nanoscale membrane according to claim 17;

filling the relief pattern of the membrane with a product; and

removing the product from the relief pattern of the nanoscale membrane to obtain shaped nanoscale products.

19. The nanoscale membrane according to claim 1 wherein the membrane is substantially transparent to light or electron beam.

20. A device for supporting a product during electron microscopy, wherein the device comprises a membrane according to claim 19.

21. A method of performing transmission electron microscopy comprising:

providing a sample, to be viewed under transmission electron microscopy, upon the membrane of a device according to claim 20;

exposing the sample provided upon the membrane to a transmission electron microscope under conditions effective to produce an image of the sample.

22. A nanoscale membrane exposed on opposite sides thereof and having an average thickness of less than about 30 nm, a lateral length to thickness aspect ratio that is more than 10,000 to 1, and wherein the membrane is formed of a semiconductor material selected from the group of silicon, germanium, silicon or germanium alloys, p-doped silicon or germanium, and n-doped silicon or germanium.

23. The nanoscale membrane according to claim 22 wherein the membrane is less than about 10 nm thick.

24. The nanoscale membrane according to claim 22 wherein the semiconductor material is in either an amorphous form or a crystalline form.

25. The nanoscale membrane according to claim 22 wherein the membrane is substantially planar.

26. A structure comprising:

a support having at least one passage extending between opposite surfaces of the support; and

at least one nanoscale membrane according to claim 22 bound at its outer edges to the support, wherein each of the at least one nanoscale membranes confronts a passage.

27. The nanoscale membrane according to claim 22 wherein the membrane is characterized by an aspect ratio that is more than 50,000 to 1.

28. The nanoscale membrane according to claim 27 wherein the membrane is characterized by an aspect ratio that is more than 100,000 to 1.

29. A sensor comprising a membrane according to claim 22.

30. The sensor according to claim 29, wherein the sensor is a pressure sensor, a piezoelectric, or piezoresistive sensor.

31. A device for supporting a product during electron microscopy, wherein the device comprises a membrane according to claim 22, wherein the membrane is substantially transparent to light or electron beam.

32. A method of performing transmission electron microscopy comprising:

providing a sample, to be viewed under transmission electron microscopy, upon the membrane of a device according to claim 31;

exposing the sample provided upon the membrane to a transmission electron microscope under conditions effective to produce an image of the sample.