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Method for forming roughened surface

  • US 7,923,382 B2
  • Filed: 02/10/2009
  • Issued: 04/12/2011
  • Est. Priority Date: 04/28/2006
  • Status: Active Grant
First Claim
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1. A method for forming a roughened surface on a substrate, comprising:

  • providing the substrate in a reaction space with a first surface having an initial surface termination;

    forming a discontinuous surface termination on the substrate;

    forming catalyst nanoparticles on the surface of said substrate by atomic layer deposition (ALD); and

    depositing carbon nanotubes on said catalyst nanoparticles.

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