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Semiconductor device, and design method, inspection method, and design program therefor

  • US 7,924,042 B2
  • Filed: 08/24/2006
  • Issued: 04/12/2011
  • Est. Priority Date: 11/01/2002
  • Status: Active Grant
First Claim
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1. An inspection method of inspecting a multilayer semiconductor device which includes a plurality of circuit blocks which include individual functions of the semiconductor device and are formed on a semiconductor substrate, the method comprising the step of:

  • performing inspection with an electrode of a measurement terminal, wherein the measurement terminal is provided on a wiring line which extends from one of the plurality of circuit blocks which include the individual functions of the semiconductor device, the electrode being formed in an uppermost layer of the semiconductor device, and the measurement terminal including a pad in each remaining layer of the semiconductor device, and pads in each remaining layer of the semiconductor device being electrically connected with each other by contact holes which pass through each insulating film of the semiconductor device.

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