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Micromechanical bulk acoustic mode resonators having interdigitated electrodes and multiple pairs of anchor supports

  • US 7,924,119 B1
  • Filed: 11/10/2010
  • Issued: 04/12/2011
  • Est. Priority Date: 01/19/2007
  • Status: Expired due to Fees
First Claim
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1. A micromechanical resonator operable in a bulk acoustic mode, comprising:

  • a resonator apparatus suspended over a substrate by a plurality of pairs of anchors, said resonator apparatus comprising a conductive metal layer, a piezoelectric layer on the conductive metal layer and a plurality of interdigitated electrodes on the piezoelectric layer; and

    wherein a total number of electrode fingers in the plurality of interdigitated electrodes is greater than a total number of the plurality of pairs of anchors.

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