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Apparatus and method for reducing slippage between structures in an interferometric modulator

  • US 7,924,494 B2
  • Filed: 12/04/2009
  • Issued: 04/12/2011
  • Est. Priority Date: 09/27/2004
  • Status: Expired due to Fees
First Claim
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1. An electromechanical systems device, comprising:

  • a substrate layer comprising a first reflective surface formed on a transparent substrate, the first reflective surface being partially transmissive;

    a movable layer comprising a second reflective surface, the second reflective surface being spaced from the first reflective surface, the first reflective surface and the second reflective surface defining a cavity therebetween;

    a support structure positioned at a side of the cavity and configured to separate at least a portion of the substrate layer from at least a portion of the movable layer; and

    a roughened interface configured to increase adhesion between the support structure and the movable layer, the roughened interface comprisingan etched surface of the support structure, anda surface of the movable layer connected to the etched surface of the support structure.

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