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Process apparatus with on-the-fly workpiece centering

  • US 7,925,378 B2
  • Filed: 07/11/2006
  • Issued: 04/12/2011
  • Est. Priority Date: 07/11/2005
  • Status: Active Grant
First Claim
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1. A substrate processing apparatus comprising:

  • a transport apparatus adapted for transporting a substrate between processing stations of the processing apparatus;

    at least one sensor connected to the transport apparatus and capable of sensing the substrate transported by the transport apparatus, the at least one sensor being arranged for sending at least one signal in response to sensing the substrate; and

    a controller communicably connected to the sensor and arranged to determine alignment of the substrate in at least two directions, disposed in a plane of the substrate and angled relative to each other, relative to a predetermined location from the at least one signal identifying no more than two points on the substrate and independent of radial variances between substrates.

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