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Mini environment apparatus, inspection apparatus, manufacturing apparatus and cleaning method of space

  • US 7,925,390 B2
  • Filed: 07/30/2007
  • Issued: 04/12/2011
  • Est. Priority Date: 07/31/2006
  • Status: Active Grant
First Claim
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1. An inspection apparatus for detecting a defect on a substrate, comprising:

  • a first casing having a first fan-filter-unit;

    a second casing having a second fan-filter-unit, the second casing is smaller than the first casing and being adjacent to the first casing;

    a clean chamber which is defined by a part of wall of the first casing and the second casing;

    a shutter arranged on the wall of the first casing to communicate with the clean chamber;

    a third casing having a third fan-filter-unit and surrounding the second casing;

    a pod for accommodating the substrate;

    a carrier apparatus for carrying the substrate from the pod to the clean chamber and being arranged in the first casing;

    an optical type inspection apparatus for inspecting a defect on the substrate and being arranged in the clean chamber;

    a first pressure measuring unit for measuring a first pressure in an external environment;

    a second pressure measuring unit for measuring a second pressure within the first casing;

    a third pressure measuring unit for measuring a third pressure within the clean chamber;

    a fourth pressure measuring unit for measuring a fourth pressure within the third casing; and

    a control unit for controlling the first, second and third fan-filter-units based on the first, second and third pressures.

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