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Precision flow control system

  • US 7,927,477 B2
  • Filed: 12/12/2008
  • Issued: 04/19/2011
  • Est. Priority Date: 06/13/2001
  • Status: Expired due to Fees
First Claim
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1. A low flow rate precision flow controller system comprising:

  • (a) a plurality of fluid supplies in fluid communication with a fluid outlet so that a plurality of fluids mix to yield mixed fluids before flowing through the outlet;

    (b) a pressure source for each fluid, each pressure source applying pressure to the respective fluid;

    (c) a flowmeter for each fluid, each fluid detecting the flow rate of the respective fluid; and

    (d) a controller for each pressure source in communication with the respective flowmeter and the respective pressure source wherein the controller compares the respective measured flow rate to a respective desired flow rate and adjusts the respective pressure source so that the respective fluid flows at the respective desired flow rate, wherein the fluids flow out of the fluid outlet at a flow rate of less than approximately 100 microliters/minute.

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