Methods of and apparatus for accessing a process chamber using a dual zone gas injector with improved optical access

• US 7,928,366 B2
• Filed: 10/06/2006
• Issued: 04/19/2011
• Est. Priority Date: 10/06/2006
• Status: Active Grant

• Current Assignee: Lam Research Corporation
• Original Assignee: Lam Research Corporation
• Inventors: Sharpless, Leonard, Bogart, Jeff A., Singh, Harmeet
• Primary Examiner(s): Johnston; Phillip A.
• Application Number:
  US11/544,316
• Publication Number:
  US 20080083883A1
• Time in Patent Office: 1,656 Days
• Field of Search: 250/288
• US Class Current: 250/288
• CPC Class Codes: C23C 16/513 using plasma jets
• CPC Class Codes: H01J 37/3244 Gas supply means

Abstract

An injector provides optical access into a process chamber along an axial path from a diagnostic end point outside the process chamber through an optical access window. A hollow housing body receives first and second process gases, and surrounds the axial path. A sleeve in the body is urged against the body to minimize particle generation, and defines a first gas bore injecting the first process gas into the process chamber. A second gas bore of the sleeve surrounds the axial path for injecting the second process gas into the process chamber, allowing an optical signal to have a desired signal-to-noise ratio (SNR) at the end point. Methods provide a septum in the second bore dividing the second bore into apertures configured to reduce etching of and deposition on the optical access window and to maintain the desired SNR at the diagnostic end point.

Claims

1. A gas injector for a process chamber configured with an optical access window allowing optical access to and from the process chamber, the injector comprising:

a sleeve configured with a bore defining a path for gas and for the optical access, the bore being configured with an access area configured to flow process gas and transmit an optical access signal having a desired signal-to-noise ratio (SNR); and

a septum configured for reception in the bore, the septum being further configured to divide the access area of the bore into at least two separate access apertures, the at least two separate access apertures extend parallel to an optical path directed toward the optical access window, each of the at least two separate access apertures being configured to cooperate with the other access aperture to flow the process gas and to transmit the optical access signal having the desired SNR through the optical access window.

2. A gas injector as recited in claim 1, wherein the each of the at least two separate access apertures is configured to reduce the likelihood of formation of a plasma in the respective separate access aperture.

3. A gas injector as recited in claim 1, wherein the configurations of the sleeve and the septum define walls of each access aperture to promote adherence to the walls of particles moving in a respective access aperture toward the optical access window before the particles reach the optical access window.

4. A gas injector as recited in claim 1, wherein:

the optical access signal indicates a condition of a substrate, and

the at least two separate access apertures are configured by the septum to collectively allow transmission of the optical signal indicating the condition of the substrate, the transmission being from the process chamber through the respective at least two separate access apertures and through the optical access window to a location outside the chamber.

5. A gas injector as recited in claim 1, wherein each of the at least two separate access apertures is at least three separate access apertures.

6. A gas injector for simultaneously transmitting an optical signal along an optical path from a process chamber through an optical access window to a diagnostic end point outside the process chamber and injecting a first process gas into the process chamber;

the gas injector comprising;

a housing configured to receive the process gas, the housing being further configured with a hollow body surrounding the optical path and mounting the optical access window adjacent to the diagnostic end point;

a sleeve configured for reception in the hollow body to define a bore surrounding the optical path and configured with an optical access area for simultaneously injecting the process gas into the process chamber and for allowing optical access by an optical signal from the process chamber through the optical access window, the optical signal having at least a minimum signal-to-noise ratio (SNR); and

a septum configured for reception in the gas bore, the septum being further configured to divide the optical access area into a plurality of optical signal apertures, the plurality of optical signal apertures extend parallel to the optical path directed toward the optical access window, each of the optical signal apertures being configured so that the optical signal apertures collectively transmit through the optical access window the optical access signal having at least the minimum SNR.

7. A gas injector as recited in claim 6, wherein the septum is configured to reduce the likelihood of formation of a plasma in the respective optical signal apertures and to provide walls for collecting particles moving in the optical path toward the optical access window, the septum configuration reducing deposition of the particles on and etching of the optical access window.

8. A gas injector as recited in claim 7, wherein the septum is further configured to be removable from the bore to permit removal from the septum of the deposited particles and replacement in the bore.

9. A gas injector as recited in claim 7, wherein the septum provides each optical signal aperture with a cross sectional area less than that of the bore to facilitate the reducing of the likelihood of formation of a plasma in the respective optical signal aperture and provides the optical signal apertures with an aggregate surface area greater than that of the bore to facilitate the reducing of the deposition of the particles on the optical access window.

10. A gas injector as recited in claim 6, wherein the septum extends across a diameter of the bore so that the plurality of optical signal apertures are two optical signal apertures.

11. A gas injector as recited in claim 6, wherein the septum is configured with a cross-shape comprising cross pieces extending across respective diameters of the bore so that the plurality of optical signal apertures are four optical signal apertures.

12. A gas injector as recited in claim 6, wherein the septum is configured with a plurality of tubes so that the plurality of optical signal apertures exceeds four optical signal apertures.

13. A gas injector as recited in claim 6, wherein:

each of the sleeve received in the hollow body and the housing is configured with a mating interface surface configured to minimize particle generation when the mating interface surfaces are urged into contact; and

the housing is further configured with a first mount for the optical access window, the first mount being configured to cause the mounted optical access window to urge the sleeve mating interface surface into contact with the housing mating interface surface.

14. A gas injector as recited in claim 13, wherein:

the sleeve is further configured with a first sleeve end having a second mount;

the injector is further configured with a flexure mounted on the second mount; and

the mounted optical access window urges the sleeve mating surface by flexing the flexure, the flexed flexure urging the sleeve mating interface surface toward the housing mating interface surface so the sleeve mating interface surface contacts the housing interface mating surface.

15. A gas injector as recited in claim 6, wherein:

the hollow body is configured with spaced first and second gas inlets and an annular pad located between the spaced gas inlets; and

the sleeve further configured for reception in the housing defines a gas supply conduit for a second gas, and

wherein the sleeve is configured with an annular wiper extending across the gas supply conduit into contact with the annular pad to center the sleeve in the bore and direct the received first and second process gases separately into the respective bore and the gas supply conduit.

16. A gas injector as recited in claim 6, wherein each of the housing, the sleeve, and the septum is fabricated from a material taken from the group consisting of:

ceramic, quartz, and polymer.