Method and structure for forming strained SI for CMOS devices

• US 7,928,443 B2
• Filed: 01/11/2010
• Issued: 04/19/2011
• Est. Priority Date: 11/05/2003
• Status: Expired due to Fees

• Current Assignee: GlobalFoundries, Inc.
• Original Assignee: International Business Machines Corporation
• Inventors: Yang, Haining S., Zhang, Ying, Steegen, An L.
• Primary Examiner(s): Smoot; Stephen W
• Application Number:
  US12/685,054
• Publication Number:
  US 20100109048A1
• Time in Patent Office: 463 Days
• Field of Search: 257/65, 257/E29.084
• US Class Current: 257/65
• CPC Class Codes: H01L 21/02381 Silicon, silicon germanium, germanium
• CPC Class Codes: H01L 21/0243 Surface structure
• CPC Class Codes: H01L 21/02532 Silicon, silicon germanium, germanium
• CPC Class Codes: H01L 21/02658 Pretreatments cleaning in general H01L21/02041
• CPC Class Codes: H01L 21/26506 in group IV semiconductors
• CPC Class Codes: H01L 21/26513 of electrically active species
• CPC Class Codes: H01L 21/2658 of a molecular ion, e.g. decaborane
• CPC Class Codes: H01L 21/76224 using trench refilling with dielectric materials trench filling with polycristalline silicon H01L21/763; together with vertical isolation, e.g. trench refilling in a SOI substrate H01L21/76264
• CPC Class Codes: H01L 21/76232 of trenches having a shape other than rectangular or V-shape, e.g. rounded corners, oblique or rounded trench walls H01L21/76229 takes precedence
• CPC Class Codes: H01L 21/76283 Lateral isolation by refilling of trenches with dielectric material
• CPC Class Codes: H01L 21/823807 with a particular manufacturing method of the channel structures, e.g. channel implants, halo or pocket implants, or channel materials
• CPC Class Codes: H01L 21/823814 with a particular manufacturing method of the source or drain structures, e.g. specific source or drain implants or silicided source or drain structures or raised source or drain structures
• CPC Class Codes: H01L 21/823878 isolation region manufacturing related aspects, e.g. to avoid interaction of isolation region with adjacent structure
• CPC Class Codes: H01L 29/1054 with a variation of the composition, e.g. channel with strained layer for increasing the mobility
• CPC Class Codes: H01L 29/665 using self aligned silicidation, i.e. salicide formation of conductive layers comprising silicides H01L21/28518
• CPC Class Codes: H01L 29/66575 where the source and drain or source and drain extensions are self-aligned to the sides of the gate H01L29/66606 takes precedence
• CPC Class Codes: H01L 29/78 with field effect produced by an insulated gate H01L29/7725, H01L29/775, H01L29/778 take precedence
• CPC Class Codes: H01L 29/7833 with lightly doped drain or source extension, e.g. LDD MOSFET's; DDD MOSFET's for thin film transistors H01L29/78618
• CPC Class Codes: H01L 29/7842 means for exerting mechanical stress on the crystal lattice of the channel region, e.g. using a flexible substrate variation of the composition of the channel H01L29/1054
• CPC Class Codes: H01L 29/7846 the means being located in the lateral device isolation region, e.g. STI
• CPC Class Codes: H01L 29/7849 : the means being provided under the channel

Abstract

A semiconductor device includes a semiconductor substrate having at least one gap, extending under a portion of the semiconductor substrate. A gate stack is on the semiconductor substrate. A strain layer is formed in at least a portion of the at least one gap. The strain layer is formed only under at least one of a source region and a drain region of the semiconductor device.

Claims

1. A semiconductor device, comprising:

a semiconductor substrate having at least one gap, extending under an upper portion of the semiconductor substrate and above a lower portion of the semiconductor substrate;

a gate stack on the semiconductor substrate;

a strain layer formed in at least a portion of the at least one gap; and

source and drain regions formed in the upper portion of the semiconductor substrate and on respective sides of the gate stack.

2. The device of claim 1, wherein the gap is formed prior to forming the gate stack.

3. The device of claim 1, wherein the semiconductor device is doped with at least one of Ge, As, B, In and Sb.

4. The device of claim 1, wherein stresses of 1 GPa to 2 GPa exist within a channel region of the device.

5. The device of claim 1, wherein the strain layer is a pre-formed strain layer formed in at least a portion of the at least one gap.

6. The device of claim 5, wherein a channel region is stressed by the pre-formed strain layer.

7. The device of claim 5, wherein the gate stack is formed over the pre-formed strain layer and after the channel region is stressed.

8. The device of claim 1, wherein the strain layer is formed under at least one of a source region and a drain region of the semiconductor device.

9. The device of claim 1, wherein the strain layer is formed only under at least one of a source region and a drain region of the semiconductor device.

10. A semiconductor device, comprising:

a semiconductor substrate;

a strain layer arranged in a gap formed in the semiconductor substrate such that at least a portion of the semiconductor substrate extends over the gap; and

a gate stack formed on the semiconductor substrate above the gap, the gate stack including a gate body disposed on a gate dielectric and sidewall spacers formed on sides of the gate body and on a top surface of the gate dielectric; and

source and drain regions formed in upper portions of the semiconductor substrate.

11. The device of claim 10, wherein the at least one gap is formed by doping a portion of the semiconductor substrate and then etching the doped portion of the semiconductor substrate.

12. The device of claim 10, wherein the strain layer is formed directly under a channel of the semiconductor device.

13. The device of claim 10, wherein stresses of 1 GPa to 2 GPa exist within the channel region of the device.

14. The device of claim 10, wherein the strain layer is a pre-formed strain layer.

15. The device of claim 14, wherein the gate stack is formed on the semiconductor substrate over the pre-formed strain layer and after the pre-formed strain layer is arranged in the gap.

16. The device of claim 14, wherein the source and drain regions formed in upper portions of the semiconductor substrate over the pre-formed strain layer and after the pre-formed strain layer is arranged in the gap.

17. A p-type device, comprising:

a semiconductor substrate having a gap on opposing sides of a portion of the semiconductor substrate which is substantially directly under a channel of a semiconductor device which is formed on a top surface of the semiconductor substrate; and

a strain layer in the gap between an upper portion and lower portion of the semiconductor substrate and separated by the portion of the semiconductor substrate.

18. The device of claim 17, further comprising source and drain regions formed in the upper portion of the semiconductor substrate.

19. The device of claim 17, further comprising oxide material in the gaps, on sides of the strain layer.

20. The device of claim 17, wherein stresses of 1 GPa to 2 GPa exist within the channel.