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Nonvolatile semiconductor memory and manufacturing method thereof

  • US 7,928,497 B2
  • Filed: 09/13/2007
  • Issued: 04/19/2011
  • Est. Priority Date: 09/20/2006
  • Status: Active Grant
First Claim
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1. A nonvolatile semiconductor memory comprising:

  • at least one memory cell and one peripheral transistor disposed on a semiconductor substrate,the memory cell having;

    a first gate insulating film provided on a first element area of the semiconductor substrate, the first element area being defined by a first isolation insulating layer provided on the semiconductor substrate;

    a floating gate electrode provided on the first gate insulating film;

    a first intergate insulating film having a multilayer structure and provided on the floating gate electrode and the isolation insulating layer; and

    a control gate electrode provided on the first intergate insulating film,the peripheral transistor having;

    a second gate insulating film provided on a second element area of the semiconductor substrate, the second element area being defined by a second isolation insulating layer provided on the semiconductor substrate;

    a first gate electrode provided on the second gate insulating film;

    a second intergate insulating film having a multilayer structure and provided on the first gate electrode and the second isolation insulating layer; and

    a second gate electrode provided on the second intergate insulating film,wherein the first and the second intergate insulating films have the same multilayer structure, and a first insulating film serving as a lowermost layer of the first intergate insulating film contacting the first isolation insulating layer is thinner than a second insulating film serving as a lowermost layer of the second intergate insulating film contacting the second isolation insulating layer, anda thickness of the first intergate insulating film excluding the first insulating film is the same as a thickness of the second intergate insulating film excluding the second insulating film.

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