Non-tensioned carbon nanotube switch design and process for making same

• US 7,928,521 B1
• Filed: 05/31/2005
• Issued: 04/19/2011
• Est. Priority Date: 05/31/2005
• Status: Expired due to Fees

• Current Assignee: Nantero Incorporated
• Original Assignee: Nantero Incorporated
• Inventors: Bertin, Claude L., Rueckes, Thomas, Burke, Peter A.
• Primary Examiner(s): Gebremariam; Samuel A
• Application Number:
  US11/142,725
• Time in Patent Office: 2,149 Days
• Field of Search: 257/415, 977/932
• US Class Current: 257/415
• CPC Class Codes: B82Y 10/00 Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
• CPC Class Codes: H01H 1/0094 Switches making use of nanoelectromechanical systems [NEMS]
• CPC Class Codes: H01H 2001/0042 Bistable switches, i.e. having two stable positions requiring only actuating energy for switching between them, e.g. with snap membrane or by permanent magnet
• CPC Class Codes: H01H 2059/0045 with s-shaped movable electrode, positioned and connected between two driving fixed electrodes, e.g. movable electrodes moving laterally when driving voltage being applied
• CPC Class Codes: H01H 59/0009 making use of micromechanics
• CPC Class Codes: H10K 10/50 Bistable switching devices
• CPC Class Codes: H10K 85/221 Carbon nanotubes
• CPC Class Codes: Y10S 977/932 for electronic or optoelectronic application

Abstract

The invention comprises a carbon nanotube switch suitable for use in an integrated circuit structure and capable of being moved from a first position in a first plane in the switch to a second position in a second plane in the switch using approximately the same energy as required to move the switch from the second position back to the first position. The switch comprises a flexible carbon nanotube strip secured clamped at one end in a first plane in a switching chamber, and secured or clamped, at the opposite end of the carbon nanotube, in a second plane in the switching chamber, which is parallel to the first plane but spaced therefrom, to permit the central portion of the carbon nanotube strip to move in the chamber between a first position in the first plane and in electrical contact with one or more first electrodes and a second position in the second plane and in electrical contact with one or more second electrodes.

Claims

1. A carbon nanotube switch suitable for use in an integrated circuit structure and capable of being moved from a first position in a first plane to a second position in a second plane approximately parallel to, but spaced from, said first plane of said carbon nanotube switch of the invention, said switch further characterized by use of approximately the same energy to move said switch from said first position in said first plane to said second position in said second plane as required to move said switch back from said second position in said second plane to said first position in said first plane, said switch comprising:

a) a switching chamber;

b) a flexible carbon nanotube strip in said switching chamber;

(i) said flexible carbon nanotube strip secured at one end at a first securement point in said first plane in said switching chamber; and

(ii) said flexible carbon nanotube strip secured at its opposite end at a second securement point in said second plane in said switching chamber approximately parallel to, and spaced a distance from, said first plane in said switching chamber;

c) a first electrode located in said first plane; and

d) a second electrode located in said second plane;

wherein a central portion of said flexible carbon nanotube strip moves in said switching chamber between said first plane in said switching chamber and said second plane, wherein said first securement point and said first electrode are located in said first plane and said second securement point and said second electrode are located in said second plane, and wherein said second plane is different from, approximately parallel to, and spaced a distance from said first plane.

2. The flexible carbon nanotube switch of claim 1 wherein said flexible carbon nanotube strip contacts at least two electrodes when in either said first or second positions.

3. The flexible carbon nanotube switch of claim 1 wherein said flexible carbon nanotube strip contacts at least three or more electrodes when in either said first or said second positions.

4. A flexible carbon nanotube switch suitable for use in an integrated circuit structure and having a flexible carbon nanotube strip capable of being moved from a first position in a first plane to a second position in a second plane approximately parallel to, but spaced from, said first plane, using approximately the same energy as required to move the switch from said second position back to said first position, which comprises:

a) a switching chamber;

b) a flexible carbon nanotube strip in said switching chamber;

1) having one end secured at a first securement point in a first plane in said switching chamber;

2) having an opposite end secured at a second securement point in a second plane in said switching chamber approximately parallel to, and spaced a distance from said first plane in said switching chamber; and

3) a central portion of said flexible carbon nanotube strip capable of moving in said switching chamber between said first position in said first plane in said switching chamber, and a second position approximately parallel to said second plane and in electrical contact with one or more second electrodes;

c) a plurality of first electrodes in electrical contact with said flexible carbon nanotube strip when said flexible carbon nanotube strip is in said first position in said first plane; and

d) a plurality of second electrodes in electrical contact with said flexible carbon nanotube strip when said flexible carbon nanotube strip is in said second position in said second plane

wherein said first securement point and said plurality of first electrodes are located in said first plane and said second securement point and said plurality of second electrodes are located in said second plane, and wherein said second plane is different from, approximately parallel to, and spaced a distance from said first plane.