Method and structure for an out-of-plane compliant micro actuator

• US 7,928,632 B2
• Filed: 01/15/2009
• Issued: 04/19/2011
• Est. Priority Date: 10/31/2005
• Status: Active Grant

• Current Assignee: Movella Incorporated (Movella Holdings, Inc.)
• Original Assignee: mCube, Inc.
• Inventors: Yang, Xiao (Charles)
• Primary Examiner(s): Dougherty; Thomas M
• Application Number:
  US12/353,969
• Publication Number:
  US 20100007238A1
• Time in Patent Office: 824 Days
• Field of Search: 310/309, 361/278, 438/52
• US Class Current: 310/309
• CPC Class Codes: H02N 1/004 in which a body is moved along a path due to interaction with an electric field travelling along the path

Abstract

This present invention relates generally to manufacturing objects. More particularly, the invention relates to a method and structure for fabricating an out-of-plane compliant micro actuator. The compliant actuator has large actuation range in both vertical and horizontal planes without physical contact to the substrate. Due to fringe field actuation, the compliant actuator has no pull-in phenomenon and requires low voltage by a ‘zipping’ movement compared to conventional parallel plate electrostatic actuators. The method and device can be applied to micro actuators as well as other devices, for example, micro-electromechanical sensors, detectors, fluidic, and optical systems.

Claims

1. An actuator device, the actuator device comprising:

a substrate member, the substrate member comprising a surface region;

a first actuator member comprising a first comb-shaped electrode having a first fixed end, a first plurality of free ends, and a first length formed between the first fixed end and the first plurality of free ends, the first fixed end being coupled to a first portion of the surface region, each of the first plurality of free ends being at a first distance from the surface region associated with a neutral state of the first actuator member; and

a second actuator member comprising a second comb-shaped electrode having a second fixed end, a second plurality of free ends, and a second length formed between the second fixed end and the second plurality of free ends, the second fixed end being coupled to a second portion of the surface region, each of the second plurality of free ends being at a second distance from the surface region associated with a neutral state of the second actuator member and being spatially interlaced with the first plurality of free ends in a head-to-head manner;

whereupon the first comb-shaped electrode and the second comb-shaped electrode are capable of being biased relative to each other by a voltage potential;

wherein the first actuator member and the second actuator member have a stressed state corresponding to the first plurality of free ends being moved from the first distance to a third distance towards the surface region and the second plurality of free ends being moved from the second distance to a fourth distance towards the surface region;

wherein the movable compliant actuator is a stack of films.

2. The device of claim 1 wherein the first comb-shaped electrode and the second comb-shaped electrode are actuated by an electrostatic force to cause relative movement of the first plurality of free ends of the first actuator member and the second plurality of free ends of the second actuator member.

3. The device of claim 1 wherein the first actuator member, except for the first fixed end, is free from physical contact with the surface region;

the second actuator member, except for the second fixed end, is free from physical contact with the surface region and the first actuator member.

4. The device of claim 1 wherein the stressed state is characterized by a first mechanical restore force within the first length and a second mechanical restore force within the second length.

5. The device of claim 4 wherein the first mechanical restore force and the second mechanical restore force act together to counter-balance the electrostatic force between the first comb-shaped electrode and the second comb-shaped electrode.

6. The device of claim 1 wherein the voltage potential comprises a maximum value corresponding to a stressed state associated with the first actuator member and the second actuator member so that the first length of the first comb-shaped electrode and the second length of the second comb-shaped electrode are substantially parallel to the surface region and still free from physical contact with each other.

7. The device of claim 1 wherein the substrate comprises a silicon wafer including one or more integrated circuits.

8. The device of claim 1 wherein the substrate is a TFT glass substrate.

9. The device of claim 1 wherein the movable compliant actuator member is made of a stressed film selected from:

Aluminum, Titanium, TiN, Copper, amorphous Silicon, poly Silicon, single crystal Silicon, SiO2, Si3N4, or metal alloy

10. The device of claim 1 wherein the stack of films is selected from films of different Coefficient of Thermal Expansion (CTE) including Aluminum/Ti, Aluminum/TiN, and TiN/amorphous Silicon.

11. An actuator device, the actuator device comprising:

a TFT glass substrate member, the TFT glass substrate member comprising a surface region;

a first actuator member comprising a first comb-shaped electrode having a first fixed end, a first plurality of free ends, and a first length formed between the first fixed end and the first plurality of free ends, the first fixed end being coupled to a first portion of the surface region, each of the first plurality of free ends being at a first distance from the surface region associated with a neutral state of the first actuator member; and

a second actuator member comprising a second comb-shaped electrode having a second fixed end, a second plurality of free ends, and a second length formed between the second fixed end and the second plurality of free ends, the second fixed end being coupled to a second portion of the surface region, each of the second plurality of free ends being at a second distance from the surface region associated with a neutral state of the second actuator member and being spatially interlaced with the first plurality of free ends in a head-to-head manner;

whereupon the first comb-shaped electrode and the second comb-shaped electrode are capable of being biased relative to each other by a voltage potential;

wherein the first actuator member and the second actuator member have a stressed state corresponding to the first plurality of free ends being moved from the first distance to a third distance towards the surface region and the second plurality of free ends being moved from the second distance to a fourth distance towards the surface region.

12. The device of claim 11 wherein the first comb-shaped electrode and the second comb-shaped electrode are actuated by an electrostatic force to cause relative movement of the first plurality of free ends of the first actuator member and the second plurality of free ends of the second actuator member.

13. The device of claim 11 wherein the first actuator member, except for the first fixed end, is free from physical contact with the surface region;

the second actuator member, except for the second fixed end, is free from physical contact with the surface region and the first actuator member.

14. The device of claim 11 wherein the substrate comprises a silicon wafer including one or more integrated circuits.

15. The device of claim 11 wherein the movable compliant actuator member is made of a stressed film selected from:

Aluminum, Titanium, TiN, Copper, amorphous Silicon, poly Silicon, single crystal Silicon, SiO2, Si3N4, or metal alloy.

16. The device of claim 11 wherein the movable compliant actuator is a stack of films selected from films of different Coefficient of Thermal Expansion (CTE) including Aluminum/Ti, Aluminum/TiN, and TiN/amorphous Silicon.

17. An actuator device, the actuator device comprising:

a substrate member, the substrate member comprising a surface region;

a first actuator member comprising a first comb-shaped electrode having a first fixed end, a first plurality of free ends, and a first length formed between the first fixed end and the first plurality of free ends, the first fixed end being coupled to a first portion of the surface region, each of the first plurality of free ends being at a first distance from the surface region associated with a neutral state of the first actuator member; and

a second actuator member comprising a second comb-shaped electrode having a second fixed end, a second plurality of free ends, and a second length formed between the second fixed end and the second plurality of free ends, the second fixed end being coupled to a second portion of the surface region, each of the second plurality of free ends being at a second distance from the surface region associated with a neutral state of the second actuator member and being spatially interlaced with the first plurality of free ends in a head-to-head manner;

whereupon the first comb-shaped electrode and the second comb-shaped electrode are capable of being biased relative to each other by a voltage potential;

wherein the first actuator member and the second actuator member have a stressed state corresponding to the first plurality of free ends being moved from the first distance to a third distance towards the surface region and the second plurality of free ends being moved from the second distance to a fourth distance towards the surface region;

wherein the movable compliant actuator is a stack of films selected from films of different Coefficient of Thermal Expansion (CTE) including Aluminum/Ti, Aluminum/TiN, and TiN/amorphous Silicon.

18. The device of claim 17 wherein the first comb-shaped electrode and the second comb-shaped electrode are actuated by an electrostatic force to cause relative movement of the first plurality of free ends of the first actuator member and the second plurality of free ends of the second actuator member.

19. The device of claim 17 wherein the first actuator member, except for the first fixed end, is free from physical contact with the surface region;

the second actuator member, except for the second fixed end, is free from physical contact with the surface region and the first actuator member.

20. The device of claim 17 wherein the substrate comprises a silicon wafer including one or more integrated circuits.